A New Focused-Ion-Beam Microsampling Technique for TEM Observation of Site-specific Area's

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1999, Pages 449-453

  Ohnishi, T ^a   Koike, H ^a   Ishitani, T ^a   Tomimatsu, S ^a   Umemura, K ^a   Kamino, T ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM ASSISTED DEPOSITION; ION BEAMS; MAGNETIC MATERIALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAM (FIB) MICROSAMPLING; SCANNING ION MICROSCOPE (SIM);

SPECIMEN PREPARATION;

EID: 1542300885     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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