Growth of SrTiO3 on Si(001) by hybrid molecular beam epitaxy

Physica Status Solidi - Rapid Research Letters

Volumn 8, Issue 11, 2014, Pages 917-923

  Zhang, Lei ^a   Engel Herbert, Roman ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Chemical vapor deposition; Heteroepitaxy; Molecular beam epitaxy; Oxide electronics; Perovskites; SrTiO3

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CARBONIZATION; CHEMICAL BEAM EPITAXY; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; EPITAXIAL GROWTH; INTEGRAL EQUATIONS; INTERFACES (MATERIALS); MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; ORGANOMETALLICS; PEROVSKITE; SILICON COMPOUNDS; STRONTIUM; STRONTIUM TITANATES; THIN FILMS;

ATOMICALLY SMOOTH SURFACE; COMBINATORIAL THIN FILMS; CRYSTALLIZATION BEHAVIOR; HETEROGENEOUS INTEGRATION; METAL ORGANIC PRECURSORS; OXIDE ELECTRONICS; SRTIO3; TITANIUM TETRAISOPROPOXIDE;

FILM GROWTH;

EID: 84910605251     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201409383     Document Type: Article

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