A strong electro-optically active lead-free ferroelectric integrated on silicon

Nature Communications

Volumn 4, Issue , 2013, Pages

  Abel, Stefan ^a   Stöferle, Thilo ^a   Marchiori, Chiara ^a   Rossel, Christophe ^a   Rossell, Marta D ^b   Erni, Rolf ^b   Caimi, Daniele ^a   Sousa, Marilyne ^a   Chelnokov, Alexei ^c   Offrein, Bert J ^a   Fompeyrine, Jean ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^c CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM; BARIUM TITANATE; LEAD; LITHIUM; SILICON; TITANIUM; UNCLASSIFIED DRUG;

BIOFILM; ELECTRICAL PROPERTY; INTEGRATED APPROACH; LINEARITY; OPTICAL PROPERTY; OXIDE; SILICON; TITANATE;

ARTICLE; ELECTRICITY; FERROELECTRICITY; FILM; INTEGRATED CIRCUIT; SCANNING TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 84877782714     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms2695     Document Type: Article

References (35)

1. Warusawithana, M. P. et al. A ferroelectric oxide made directly on silicon. Science 324, 367-370 (2009).
2. Baek, S. H. et al. Giant piezoelectricity on Si for hyperactive MEMS. Science 334, 958-961 (2011).
3. Reiner, J. W. et al. Crystalline oxides on silicon. Adv. Mater. 22, 2919-2938 (2010).
4. McKee, R. A. et al. Molecular beam epitaxy growth of epitaxial barium silicide, barium oxide, and barium titanate on silicon. Appl. Phys. Lett. 59, 782-784 (1991).
5. Norga, G. J. et al. Phase of reflection high-energy electron diffraction oscillations during (Ba, Sr)O epitaxy on Si(100): a marker of Sr barrier integrity. Appl. Phys. Lett. 87, 262905 (2005).
6. 3 on large diameter Si substrates. J. Vac. Sci. Technol. B 27, 1195 (2009).
7. 3 buffer layer for non-volatile memory application. Microelectron. Eng. 88, 1232-1235 (2011).
8. 3/(Ba, Sr)O stacks epitaxially grown on Si. Appl. Phys. Lett. 88, 072913 (2006).
9. Park, J. et al. Creation of a two-dimensional electron gas at an oxide interface on silicon. Nat. Commun. 1, 94 (2010).
10. Miller, D. A. B. Device requirements for optical interconnects to silicon chips. Proc. IEEE 87, 1166-1185 (2009).
11. Simply silicon (Editorial). Nat. Photon 4, 491 (2010).
12. Michel, J. et al. High-performance Ge-on-Si photodetectors. Nat. Photon 4, 527-534 (2010).
13. Reed, G. T. et al. Silicon optical modulators. Nat. Photon 4, 518-526 (2010).
14. Wooten, E. et al. A review of lithium niobate modulators for fiber-optic communications systems. IEEE J. Sel. Topics Quantum Electron 6, 69-82 (2000). (Pubitemid 30583900)
15. Guarino, A. et al. Electro-optically tunable microring resonators in lithium niobate. Nat. Photon 1, 407-410 (2007).
16. Chen, L. et al. Compact electric field sensors based on indirect bonding of lithium niobate to silicon microrings. Opt. Express 20, 4032-4038 (2012).
17. Jacobsen, R. S. et al. Strained silicon as a new electro-optic material. Nature 441, 199-202 (2006).
18. Chmielak, B. et al. Pockels effect based fully integrated, strained silicon electro-optic modulator. Opt. Express 19, 17212-17219 (2011).
19. Yariv, A. & Yeh, P. Optical Waves in Crystals (John Wiley & Sons, 1984).
20. 3 thin-film optical waveguide modulators. Appl. Phys. Lett. 81, 1375-1377 (2002).
21. Wessels, B. W. Ferroelectric epitaxial thin films for integrated optics. Annu. Rev. Mater. Res. 37, 659-679 (2007). (Pubitemid 47497659)
22. Bernasconi, P. et al. Temperature dependence and dispersion of electro-optic and elasto-optic effect in perovskite crystals. J. Appl. Phys. 78, 2651-2658 (1995).
23. 3 thin films by radio-frequency magnetron sputtering. J. Appl. Phys. 81, 6322-6327 (1997). (Pubitemid 127572696)
24. 3 films on (001) Si. J. Appl. Phys. 100, 024108-024109 (2006).
25. Abel, S. et al. Electro-optical properties of barium titanate films epitaxially grown on silicon. Proc. SPIE 8263, 82630Y (2012).
26. 3. Jpn J. Appl. Phys. 34, 5443-5445 (1995).
27. Rabe, K. M., Ahn, C. H. & Triscone, J.-M. Physics of Ferroelectrics (SpringerVerlag, 2007).
28. Cazzanelli, M. et al. Second-harmonic generation in silicon waveguides strained by silicon nitride. Nat. Mater. 11, 148-154 (2012).
29. Liu, Z. et al. Dynamic response of polydomain ferroelectric barium titanate epitaxial thin films and its field dependence. J. Appl. Phys. 104, 064115 (2008).
30. Reitze, D. H. et al. Electro-optic properties of single crystalline ferroelectric thin films. Appl. Phys. Lett. 63, 596-598 (1993).
31. Rabiei, P. et al. Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding. Appl. Phys. Lett. 85, 4603-4605 (2004). (Pubitemid 40009636)
32. 3 films grown on Si(100) substrate. Mater. Sci. Eng. B 120, 50-54 (2005). (Pubitemid 40708732)
33. 3 microring electro-optically tunable resonators for active photonic devices. Opt. Lett. 36, 1119-1121 (2011).
34. Lu, Y. et al. Enhanced dielectric and electro-optic effects in relaxor oxide heterostructured superlattices. J. Phys. D: Appl. Phys 37, 2432 (2004).
35. Swanson, H. E. et al. Natl. Bur. Stand. (U.S.) 3, 45 (1954).