Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 3, 2009, Pages 461-464

  Jalan, Bharat ^a   Engel Herbert, Roman ^a   Wright, Nicholas J ^a   Stemmer, Susanne ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLED GROWTHS; EFFUSION CELLS; FILM SURFACES; FLUX RATIOS; FULL WIDTHS AT HALF MAXIMUMS; GROWTH CONDITIONS; GROWTH MODES; HIGH QUALITIES; INSULATING FILMS; LAYER-BY-LAYER GROWTHS; METAL-ORGANIC; OSCILLATION CHARACTERISTICS; REFLECTION HIGH-ENERGY ELECTRON DIFFRACTIONS; ROCKING CURVES; ROOT MEAN SQUARES; SRTIO3 FILMS; TITANIUM TETRA ISOPROPOXIDE; X- RAY DIFFRACTIONS;

COMMUNICATION CHANNELS (INFORMATION THEORY); CRYSTAL GROWTH; DIFFRACTION; MOLECULAR BEAM EPITAXY; MOLECULAR DYNAMICS; OXYGEN; SEMICONDUCTOR QUANTUM WIRES; STOICHIOMETRY; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM;

MOLECULAR BEAMS;

EID: 65549116127     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3106610     Document Type: Article

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