Lateral scaling of Pb(Mg1/3Nb2/3)O 3-PbTiO3 thin films for piezoelectric logic applications

Journal of Applied Physics

Volumn 115, Issue 23, 2014, Pages

  Keech, Ryan ^a   Shetty, Smitha ^a   Kuroda, Marcelo A ^b,c   Hu Liu, Xiao ^c   Martyna, Glenn J ^c   Newns, Dennis M ^c   Trolier McKinstry, Susan ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b AUBURN UNIVERSITY   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; HYSTERESIS LOOPS; LEAD; PERMITTIVITY; REMANENCE; THIN FILMS;

2-METHOXYETHANOL; CHEMICAL SOLUTION DEPOSITION; COUNTER CLOCKWISE ROTATION; DOMAIN-WALL MOBILITY; INTRINSIC RESPONSE; LOGIC APPLICATIONS; PIEZOELECTRIC BEHAVIOR; RELATIVE PERMITTIVITY;

PIEZOELECTRICITY;

EID: 84903202155     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4882025     Document Type: Article

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