Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

Microelectronic Engineering

Volumn 85, Issue 4, 2008, Pages 670-674

  Liang, R H ^a   Remiens D ^a   Soyer, C ^a   Sama, N ^a   Dong, X L ^b   Wang, G S ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

Dielectric properties; Etching; Ferroelectric properties; Piezoelectric effect; PZT

Indexed keywords

CRYSTALLIZATION; ELECTRIC PROPERTIES; ETCHING; FERROELECTRIC FILMS; ION BEAMS; PIEZOELECTRICITY;

CRYSTALLIZATION TEMPERATURE; FERROELECTRIC PROPERTIES; PIEZOELECTRIC PROPERTIES;

THIN FILMS;

EID: 40449125504     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.031     Document Type: Article

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