Processing optimization of lead magnesium niobate-lead titanate thin films for piezoelectric MEMS application

Journal of the American Ceramic Society

Volumn 95, Issue 4, 2012, Pages 1269-1275

  Bastani, Yaser ^a   Bassiri Gharb, Nazanin ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE GRAIN SIZE; CHEMICAL SOLUTION DEPOSITION; COLUMNAR GRAIN; CONTENT CONTROL; DIELECTRIC PERMITTIVITIES; ELECTROMECHANICAL PROPERTY; HEAT TREATMENT CONDITIONS; LEAD MAGNESIUM NIOBATE-LEAD TITANATES; ORIENTED FILMS; PB(ZR , TI)O; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC MEMS; PLATINIZED SILICON SUBSTRATES; PMN-PT FILM; PROCESSING CONDITION; PROCESSING OPTIMIZATIONS; RELATIVE DIELECTRIC PERMITTIVITY; REMNANT POLARIZATIONS; SEED LAYER; TEXTURED FILMS;

LEAD; MAGNESIUM; NIOBIUM COMPOUNDS; OPTIMIZATION; PERMITTIVITY; PEROVSKITE; ZIRCONIUM;

PIEZOELECTRICITY;

EID: 84859649209     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2011.05042.x     Document Type: Article

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