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Volumn 103, Issue 13, 2013, Pages
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Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry
a a,e b c d d |
Author keywords
[No Author keywords available]
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Indexed keywords
LASER INTERFEROMETER MEASUREMENTS;
LEAD ZIRCONATE TITANATE THIN FILMS;
MEASURED VALUES;
PIEZOELECTRIC RESPONSE;
RIGID SUBSTRATES;
SILICON SUBSTRATES;
SUBSTRATE THICKNESS;
THEORETICAL VALUES;
LASER INTERFEROMETRY;
PIEZOELECTRICITY;
SEMICONDUCTING LEAD COMPOUNDS;
THIN FILMS;
SUBSTRATES;
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EID: 84884997676
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.4821948 Document Type: Article |
Times cited : (49)
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References (7)
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