Block copolymer nanolithography

Nanolithography and Patterning Techniques in Microelectronics

Volumn , Issue , 2005, Pages 1-38

  Trawick, M ^a   Angelescu, D ^b   Chaikin, P ^c   Register, R ^d  

^a UNIVERSITY OF RICHMOND   (United States)

^b SCHLUMBERGER DOLL RESEARCH   (United States)

^c PRINCETON UNIVERSITY   (United States)

^d Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMER NANOLITHOGRAPHIES;

BLOCK COPOLYMERS;

EID: 84902625347     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1533/9781845690908.1     Document Type: Chapter

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