-
1
-
-
0004093537
-
-
American Chemical Society: Washington, DC, Chapter 4
-
Thompson, L. F.; Willson, C. G.; Bowden, M. J., Eds. Introduction to Microlithography; American Chemical Society: Washington, DC, 1994; Chapter 4.
-
(1994)
Introduction to Microlithography
-
-
Thompson, L.F.1
Willson, C.G.2
Bowden, M.J.3
-
2
-
-
0002838502
-
Microelectronics Technology: Polymers for Advanced Imaging and Packaging
-
American Chemical Society: Washington, DC, Chapter 19
-
Gabor, A. H.; Ober C. K. Microelectronics Technology: Polymers for Advanced Imaging and Packaging; ACS Symposium Series 614; American Chemical Society: Washington, DC, 1995; Chapter 19.
-
(1995)
ACS Symposium Series 614
-
-
Gabor, A.H.1
Ober, C.K.2
-
3
-
-
84986816051
-
-
Hirao, A.; Ando, Y.; Nakahama, S. Macromol. Symp. 1995, 95, 293.
-
(1995)
Macromol. Symp.
, vol.95
, pp. 293
-
-
Hirao, A.1
Ando, Y.2
Nakahama, S.3
-
4
-
-
0003654530
-
-
Gabor, A. H.; Lehner, E. A.; Mao, G.; Schnegenburger, L. A.; Ober, C. K. Chem. Mater. 1994, 6, 927.
-
(1994)
Chem. Mater.
, vol.6
, pp. 927
-
-
Gabor, A.H.1
Lehner, E.A.2
Mao, G.3
Schnegenburger, L.A.4
Ober, C.K.5
-
7
-
-
0029288779
-
-
Chu, J; Rangarajan, P.; Adams, L. J.; Register, R. A. Polymer 1995, 36 (8), 1569.
-
(1995)
Polymer
, vol.36
, Issue.8
, pp. 1569
-
-
Chu, J.1
Rangarajan, P.2
Adams, L.J.3
Register, R.A.4
-
8
-
-
0005673046
-
-
Hartney, M. A.; Novembre, A. E.; Bates, F. S. J. Vac. Sci. Tech B 1985, 3(5), 1346.
-
(1985)
J. Vac. Sci. Tech B
, vol.3
, Issue.5
, pp. 1346
-
-
Hartney, M.A.1
Novembre, A.E.2
Bates, F.S.3
-
9
-
-
0029288162
-
-
Mansky, P.; Chaikin, P. M.; Thomas, E. L. J. Mater. Sci. 1995, 30, 1987.
-
(1995)
J. Mater. Sci.
, vol.30
, pp. 1987
-
-
Mansky, P.1
Chaikin, P.M.2
Thomas, E.L.3
-
10
-
-
0012224964
-
-
Mansky, P.; Harrison, C. K.; Chaikin, P. M.; Register, R. A.; Yao, M. Appl. Phys. Lett. 1996, 68 (18), 2586.
-
(1996)
Appl. Phys. Lett.
, vol.68
, Issue.18
, pp. 2586
-
-
Mansky, P.1
Harrison, C.K.2
Chaikin, P.M.3
Register, R.A.4
Yao, M.5
-
11
-
-
1842289819
-
-
Park, M.; Harrison, C.; Chaikin, P. M.; Register, R. A.; Adamson, D. H. Science 1997, 276, 1401.
-
(1997)
Science
, vol.276
, pp. 1401
-
-
Park, M.1
Harrison, C.2
Chaikin, P.M.3
Register, R.A.4
Adamson, D.H.5
-
12
-
-
0029288779
-
-
Chu, J.; Rangarajan, P.; Adams, L. J.; Register, R. A. Polymer 1995, 36 (8), 1569.
-
(1995)
Polymer
, vol.36
, Issue.8
, pp. 1569
-
-
Chu, J.1
Rangarajan, P.2
Adams, L.J.3
Register, R.A.4
-
15
-
-
0022738331
-
-
Bushnell, L. P.; Gregor, L. V.; Lyons, C. F. Solid State Technol. 1986, 29, 133.
-
(1986)
Solid State Technol.
, vol.29
, pp. 133
-
-
Bushnell, L.P.1
Gregor, L.V.2
Lyons, C.F.3
-
17
-
-
0029288162
-
-
Mansky, P.; Chaikin, P.; Thomas, E. L. J. Mater. Science 1995, 30, 1987.
-
(1995)
J. Mater. Science
, vol.30
, pp. 1987
-
-
Mansky, P.1
Chaikin, P.2
Thomas, E.L.3
-
18
-
-
0012224964
-
-
Mansky, P.; Harrison, C. K.; Chaikin, P. M.; Register, R. A.; Yao, N.; Appl. Phys. Lett. 1996, 68 (18), 2586.
-
(1996)
Appl. Phys. Lett.
, vol.68
, Issue.18
, pp. 2586
-
-
Mansky, P.1
Harrison, C.K.2
Chaikin, P.M.3
Register, R.A.4
Yao, N.5
-
19
-
-
1842289819
-
-
Park, M.; Harrison, C.; Chaikin, P. M.; Register, R. A.; Adamson, D. H. Science 1997, 276, 1401.
-
(1997)
Science
, vol.276
, pp. 1401
-
-
Park, M.1
Harrison, C.2
Chaikin, P.M.3
Register, R.A.4
Adamson, D.H.5
-
20
-
-
0031359611
-
-
Hashimoto, T.; Tsutsumi, K.; Funaki, Y. Langmuir 1997, 13, 6869.
-
(1997)
Langmuir
, vol.13
, pp. 6869
-
-
Hashimoto, T.1
Tsutsumi, K.2
Funaki, Y.3
-
21
-
-
0024681398
-
-
Lee, J-S.; Hirao, A.; Nakahama, S. Macromolecules 1989, 22, 2602.
-
(1989)
Macromolecules
, vol.22
, pp. 2602
-
-
Lee, J.-S.1
Hirao, A.2
Nakahama, S.3
-
22
-
-
0542358317
-
-
Hawker, C. J.; Elce, E.; Dao, J.; Volksen, W.; Russell, T. P.; Barclay, G. Macromolecules 1996, 29, 3876.
-
(1996)
Macromolecules
, vol.29
, pp. 3876
-
-
Hawker, C.J.1
Elce, E.2
Dao, J.3
Volksen, W.4
Russell, T.P.5
Barclay, G.6
-
23
-
-
4243759881
-
-
Chaumont, P.; Beinert, G.; Herz, J. E.; Rempp, P. Makromol. Chem. 1982, 183, 1183.
-
(1982)
Makromol. Chem.
, vol.183
, pp. 1183
-
-
Chaumont, P.1
Beinert, G.2
Herz, J.E.3
Rempp, P.4
-
24
-
-
0021121048
-
-
Yamazaki, N.; Nakahama, S.; Hirao, A.; Shiraishi, Y.; Phung, H. M. Contemp. Top. Polym. Sci. 1984, 4, 379.
-
(1984)
Contemp. Top. Polym. Sci.
, vol.4
, pp. 379
-
-
Yamazaki, N.1
Nakahama, S.2
Hirao, A.3
Shiraishi, Y.4
Phung, H.M.5
-
26
-
-
84986816051
-
-
Hirao, A.; Ando, Y.; Nakahama, S. Macromol. Symp. 1995, 95, 293.
-
(1995)
Macromol. Symp.
, vol.95
, pp. 293
-
-
Hirao, A.1
Ando, Y.2
Nakahama, S.3
-
28
-
-
0024017068
-
-
Kawakami, Y.; Hisada, H.; Yamashita U. J. Polym. Sci., Polym. Chem. 1988, 26, 1307.
-
(1988)
J. Polym. Sci., Polym. Chem.
, vol.26
, pp. 1307
-
-
Kawakami, Y.1
Hisada, H.2
Yamashita, U.3
-
30
-
-
0031233531
-
-
Avgeropoulos, A.; Dair, B. J.; Hadjichristidis, N.; Thomas, E. L., Macromolecules, 1997, 30, 5634.
-
(1997)
Macromolecules
, vol.30
, pp. 5634
-
-
Avgeropoulos, A.1
Dair, B.J.2
Hadjichristidis, N.3
Thomas, E.L.4
|