Layer by layer imaging of diblock copolymer films with a scanning electron microscope

Polymer

Volumn 39, Issue 13, 1998, Pages 2733-2744

  Harrison, Christopher ^a   Park, Miri ^a   Chaikin, P M ^a   Register, Richard A ^b   Adamson, Douglas H ^b   Yao, Nan ^b  

^a PRINCETON UNIVERSITY   (United States)

^b Princeton University   (United States)

Author keywords

Diblock copolymer films; Reactive ion etching; Scanning electron microscope

Indexed keywords

CRYSTAL MICROSTRUCTURE; PLASTIC FILMS; POLYBUTADIENES; POLYSTYRENES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

LAYER IMAGING;

BLOCK COPOLYMERS;

EID: 0032097690     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0032-3861(97)00613-7     Document Type: Article

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