Curious morphology of silicon-containing polymer films on exposure to oxygen plasma

Chemistry of Materials

Volumn 10, Issue 12, 1998, Pages 3895-3901

  Frommer, Jane ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18644367150     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm980314+     Document Type: Article

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