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Volumn 309, Issue , 2014, Pages 263-270
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Transmission electron microscopy on early-stage tin oxide film morphology grown by atmospheric pressure chemical vapor deposition
c
TNO
(Netherlands)
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Author keywords
CVD; Film growth; Nucleation; SEM; TCO; TEM
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Indexed keywords
ATMOSPHERIC PRESSURE;
CHEMICAL VAPOR DEPOSITION;
ELECTRONS;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
INTERFACIAL ENERGY;
METHANOL;
MORPHOLOGY;
NUCLEATION;
OXIDE FILMS;
SCANNING ELECTRON MICROSCOPY;
SILICON COMPOUNDS;
SILICON OXIDES;
SUBSTRATES;
TIN OXIDES;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION;
CHEMICAL VAPOR DEPOSITIONS (CVD);
FILM FORMATIONS;
FILM MORPHOLOGY;
FILM PROPERTIES;
GROWTH MODELING;
MORPHOLOGY DEVELOPMENT;
NUCLEATION BEHAVIOR;
FILM GROWTH;
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EID: 84901852164
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2014.05.024 Document Type: Article |
Times cited : (3)
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References (33)
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