Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process

Thin Solid Films

Volumn 519, Issue 4, 2010, Pages 1334-1340

  Yates, H M ^a   Evans, P ^a   Sheel, D W ^a   Remes, Z ^b   Vanecek, M ^b  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

Alcohol; Chemical vapour deposition; Morphology; Tin oxide

Indexed keywords

CHEMICAL VAPOUR DEPOSITION; DEPOSITION PROCESS; OPTICAL TRANSMITTANCE; SIZE AND SHAPE; SURFACE FEATURE; TERTIARY BUTANOL; TRANSPARENT CONDUCTING OXIDE THIN FILMS;

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; CONDUCTIVE FILMS; DEPOSITION; HYDROCARBONS; METHANOL; MORPHOLOGY; ORGANIC POLYMERS; OXIDE FILMS; TIN; TIN OXIDES; VOLATILE ORGANIC COMPOUNDS;

SURFACE MORPHOLOGY;

EID: 78349305771     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.09.037     Document Type: Article

References (32)

1. I.P. Parkin, and T.D. Manning J. Chem. Educ. 83 2006 393
2. C. Beneking, B. Rech, S. Wieder, O. Kluth, H. Wagner, W. Frammelsberger, R. Geyer, P. Lechner, H. Rubel, and H. Schade Thin Solid Films 351 1999 241
3. K.L. Chopra, S. Major, and D.K. Pandya Thin Solid Films 102 1983 1
4. R.G. Gordon MRS Bull. 25 2000 52
5. B.G. Lewis, and D.C. Paine MRS Bull. 25 2000 22
6. http://www.Pilkington.com.
7. A. Poruba, A. Fejfar, Z. Remes, J. Springer, M. Vanecek, J. Kocka, J. Meier, P. Torres, and A. Shah J. Appl. Phys. 88 2000 148
8. J. Springer, B. Rech, W. Reetz, J. Muller, and M. Vanecek Sol. Energy Mater. Sol. Cells 85 2005 1
9. J. Springer, A. Poruba, and M. Vanecek J. Appl. Phys. 96 2004 5329
10. H.M. Yates, P. Evans, D.W. Sheel, U. Dagkaldiran, A. Gordijn, F. Finger, Z. Remes, and M. Vanecek Int. J. Nanotechnol. 6 2009 816
11. J. Bailat, D. Dominé, R. Schlüchter, J. Steinhauser, S. Faÿ, F. Freitas, C. Bücher, L. Feitknecht, X. Niquille, T. Tschamer, A. Shah, and C. Ballif Conf. Record IEEE World Conf. Photovoltaic Energy Conversion, WCPEC 2007 1533
12. C. Agashe, J. Hüpkes, G. Schpe, and M. Berginski Sol. Energy Mater. Sol. Cells 93 2009 1256
13. M.N. van den Donker, A. Gordijn, H. Stiebig, F. Finger, B. Rech, B. Stannowski, R. Bartl, E.A.G. Hamers, R. Schlatmann, and G.J. Jongerden Sol. Energy Mater. Sol. Cells 91 2007 572
14. L. Holland Vacuum Deposition of Thin films 1958 Wiley New York 493 pp.
15. Libby-Owens-Ford Glass Company, H.A. McMasters, British Patent No. 632 256, Oct. 1942.
16. Libby-Owens-Ford Glass Company, British Patent No. 682 342, July 1949.
17. R. Pommier, C. Gril, and J. Marucchi Thin Solid Films 77 1981 91
18. J.L. Vossen Phys. Thin Films 9 1977 1
19. R.E. Aitchison Aust. J. Appl. Sci. 5 1954 10
20. Z.M. Jarzebski, and J.P. Marton J. Electrochem. Soc. 123 1976 199C
21. Y. Goto, and M. Mizuhashi Rept. Res. Lab. Asahi Glass Co. Ltd. 34 1984 123
22. Y. Matsui, and Y. Yamamoto Thin Solid Films 517 2009 2953
23. H.M. Yates, P. Evans, D.W. Sheel, U. Dagkaldiran, A. Gordijn, F. Finger, Z. Remes, and M. Vanecek Proceedings of the Photovoltaic Science Applications and Technology Conference, PVSAT4, Bath, UK, April 2008
24. W.B. Jackson, N.M. Amer, A.C. Boccara, and D. Fournier Appl. Opt. 20 1981 1333
25. A. Poruba, P. Klapetek, J. Holovsky, A. Purkrt, and M. Vanecek Mater. Res. Soc. Symp. Proc. 1101 2008 143
26. J. Chastain, and R.C. King Handbook of X - Ray Photoelectron Spectroscopy 1995 Physical Electronic Inc New York
27. J. Guillot, A. Jouaiti, B. Domenichini, O. Heintz, S. Zerkout, A. Mosser, and S. Bourgeois Surf. Interface Anal. 34 2002 577
28. Y.J. Sun, T. Egawa, L.Y. Zhang, and X. Yao Jpn. J. Appl. Phys. 41 2002 L1389
29. D. Briggs, M.P. Seah, Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy 1988 Wiley Chichester
30. D.W. Zeng, K.C. Yung, and C.S. Xie Surf. Coat. Technol. 153 2002 210
31. H.M. Yates, P. Evans, D.W. Sheel, U. Dagkaldiran, A. Gordijn, F. Finger, Z. Remes, and M. Vanecek ECS Trans. 25 2009 789
32. Y. Matsui, M. Mitsuhashi, and Y. Goto Surf. Coat. Technol. 169-170 2003 549