Elastic scattering corrections in AES and XPS. II. Estimating attenuation lengths and conditions required for their valid use in overlayer/substrate experiments

Surface and Interface Analysis

Volumn 25, Issue 6, 1997, Pages 430-446

  Cumpson, P J ^a   Seah, M P ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

AES; Attenuation length; Elastic scattering; IMFP; XPS

Indexed keywords

APPROXIMATION THEORY; AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; ERROR ANALYSIS; ERROR CORRECTION; MATHEMATICAL MODELS; MONTE CARLO METHODS; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC SCATTERING; INELASTIC MEAN FREE PATHS (IMFP);

INTERFACES (MATERIALS);

EID: 0031168751     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199706)25:6<430::AID-SIA254>3.0.CO;2-7     Document Type: Article

References (43)

1. M. P. Seah, in Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs and M. P. Seah, p. 201. Wiley, Chichester (1990).
2. C. J. Powell, J. Vac. Sci. Technol. A3, 1338 (1985).
3. C. J. Powell, Surf. Interface Anal. 7, 256 (1985).
4. ASTM Standard E673-91c, Standard Terminology Relating to Surface Analysis. ASTM, Philadelphia (1992).
5. A. Jablonski and C. J. Powell, Surf. Interface Anal. 20, 771 (1993).
6. P. J. Cumpson, Surf. Interface Anal. 20, 727 (1993).
7. W. H. Gries and W. S. M. Werner, Surf. Interface Anal. 16, 149 (1990).
8. Z. Ding, Fundamental Studies on the Interactions of kV Electrons with Solids for Applications to Electron Spectroscopies, PhD Thesis. Osaka University, Osaka (1990).
9. O. A. Baschenko and V. I. Nefedov, J. Electron Spectrosc. Relat. Phenom. 17, 405 (1979).
10. O. A. Baschenko and V. I. Nefedov, J. Electron Spectrosc. Relat. Phenom. 21, 153 (1980).
11. O. A. Baschenko and V. I. Nefedov, J. Electron Spectrosc. Relat. Phenom. 27, 109 (1982).
12. P. Marcus, C. Hinnen and I. Olefjord, Surf. Interface Anal. 20, 923 (1993).
13. S. Tanuma, C. J. Powell and D. R. Penn, Surf. Interface Anal. 21, 165 (1994).
14. S. Tanuma, C. J. Powell and D. R. Penn, Surf. Interface Anal. 17, 927 (1991).
15. P. M. A. Sherwood, in Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, 2nd Edn, ed. by D. Briggs and M. P. Seah, p. 555. Wiley, Chichester (1990).
16. P. J. Cumpson and M. P. Seah, Surf. Interface Anal. 18, 544 (1992).
17. J. E. Fulghum, R. Stokell, G. McGuire, B. Patnaik, N. Yu, Y. J. Zhao and N. Parikh, J. Electron Spectrosc. 60, 117 (1992).
18. H. Yoshikawa, Fundamental Study of Spectrum Analysis in Electron Spectroscopy at Solid Surface, PhD Thesis. Osaka University, Osaka (1991).
19. R. Shimizu and Z. Ding, Rep. Prog. Phys. 55, 487 (1992).
20. A. Jablonski, Surf. Interface Anal. 14, 659 (1989).
21. Z. Czyzewski, D. O. MacCallum, A. Romig and D. C. Joy, J. Appl. Phys. 68, 3066 (1990).
22. P. J. Cumpson, Surf. Interface Anal. 25, 447 (1997).
23. W. H. Gries, Surf. Interface Anal. 24, 38 (1996).
24. I. S. Tilinin, Sov. Phys. JETP 67, 1570 (1988).
25. M. Gryzinski, Phys. Rev. 138, 336 (1965).
26. S. Tanuma, C. J. Powell and D. R. Penn, Surf. Interface Anal. 11, 577 (1988).
27. M. P. Seah, in Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, p. 201. Wiley, Chichester (1983).
28. J. M. Ziman, Models of Disorder, pp. 398-404. Cambridge University Press, Cambridge (1979).
29. J. C. Tracy, J. Vac. Sci. Technol. 11, 280 (1974); C. J. Powell, Surf. Interface Anal. 7, 256 (1985).
30. J. C. Tracy, J. Vac. Sci. Technol. 11, 280 (1974); C. J. Powell, Surf. Interface Anal. 7, 256 (1985).
31. V. I. Zaporozhchenko, Y. D. Kalafati, Y. A. Kukharenko and V. M. Sergeev, Izv. Akad. Nauk SSSR. Ser. Fiz. 43, 199 (1979).
32. R. Flitsch and S. I. Raider, J. Vac. Sci. Technol. 12, 305 (1975).
33. I. Olefjord, H. J. Mathieu and P. Marcus, Surf. Interface Anal. 15, 681 (1990).
34. F. L. Battye, Phys. Rev. B9, 2887 (1974).
35. J. E. Fulghum, R. Stockell, G. McGuire, B. Patnaik, N. Yu, Y. J. Zhao and N. Parihh, J. Electron Spectrosc. 60, 117 (1992).
36. J. E. Fulghum, private communication (1992).
37. P. J. Cumpson, to be published.
38. A. Jablonski, Surf. Interface Anal. 23, 29 (1995).
39. H. Ebel, V. Pöhn, R. Svagera, M. E. Wernle, M. F. Ebel and A. Jablonski, J. Electron Spectrosc. Relat. Phenom. 50, 109 (1990).
40. A. Jablonski and H. Ebel, Surf. Interface Anal. 11, 627 (1988).
41. D. R. Penn, J. Electron Spectrosc. Relat. Phenom. 9, 29 (1976).
42. C. J. Powell, J. Vac. Sci. Technol. A4, 1532 (1986).
43. S. Tougaard and P. Sigmund, Phys. Rev. B25, 4452 (1982).