메뉴 건너뛰기




Volumn 98, Issue 5, 2011, Pages

Transmission electron microscopy of transparent conductive oxide films made by atmospheric pressure chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; ATOMIC RESOLUTION; CRYSTALLINE FILMS; FINE GRAINS; GROWTH SUBSTRATES; MORPHOLOGY DEVELOPMENT; NUCLEATION AND GROWTH; SAMPLE PREPARATION; SIMPLE METHOD; TEM; THIN FILM MORPHOLOGY; TRANSPARENT CONDUCTIVE OXIDE FILMS;

EID: 79951503865     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3551523     Document Type: Article
Times cited : (8)

References (17)
  • 1
    • 0031166108 scopus 로고    scopus 로고
    • 0040-6090, 10.1016/S0040-6090(96)09601-0
    • D. Davazoglou, Thin Solid Films 0040-6090 302, 204 (1997). 10.1016/S0040-6090(96)09601-0
    • (1997) Thin Solid Films , vol.302 , pp. 204
    • Davazoglou, D.1
  • 2
    • 0037207605 scopus 로고    scopus 로고
    • Chemical vapour deposition of coatings
    • DOI 10.1016/S0079-6425(01)00009-3, PII S0079642501000093
    • K. L. Choy, Prog. Mater. Sci. 0079-6425 48, 57 (2003). 10.1016/S0079-6425(01)00009-3 (Pubitemid 35412314)
    • (2003) Progress in Materials Science , vol.48 , Issue.2 , pp. 57-170
    • Choy, K.L.1
  • 4
    • 33344468320 scopus 로고    scopus 로고
    • 2 films grown by atmospheric pressure chemical vapor deposition
    • DOI 10.1016/j.tsf.2005.07.248, PII S0040609005011144, Selected Papers from the 5th International Conference on Caotings on Glass (ICCG5)
    • R. Y. Korotkov, P. Ricou, and A. J. E. Farran, Thin Solid Films 0040-6090 502, 79 (2006). 10.1016/j.tsf.2005.07.248 (Pubitemid 43290036)
    • (2006) Thin Solid Films , vol.502 , Issue.1-2 , pp. 79-87
    • Korotkov, R.Y.1    Ricou, P.2    Farran, A.J.E.3
  • 5
    • 34548460233 scopus 로고    scopus 로고
    • Evolution of the electrical and structural properties during the growth of Al doped ZnO films by remote plasma-enhanced metalorganic chemical vapor deposition
    • DOI 10.1063/1.2772569
    • I. Volintiru, M. Creatore, B. J. Kniknie, C. I. M. A. Spee, and M. C. M. van de Sanden, J. Appl. Phys. 0021-8979 102, 043709 (2007). 10.1063/1.2772569 (Pubitemid 47352435)
    • (2007) Journal of Applied Physics , vol.102 , Issue.4 , pp. 043709
    • Volintiru, I.1    Creatore, M.2    Kniknie, B.J.3    Spee, C.I.M.A.4    Van De Sanden, M.C.M.5
  • 6
    • 31644444420 scopus 로고    scopus 로고
    • 2 thin films by PECVD
    • DOI 10.1016/j.jcrysgro.2005.12.031, PII S0022024805015198, International Conference on Materials for Advanced Technologies
    • H. Huang, O. K. Tan, Y. C. Lee, and M. S. Tse, J. Cryst. Growth 0022-0248 288, 70 (2006). 10.1016/j.jcrysgro.2005.12.031 (Pubitemid 43172151)
    • (2006) Journal of Crystal Growth , vol.288 , Issue.1 , pp. 70-74
    • Huang, H.1    Tan, O.K.2    Lee, Y.C.3    Tse, M.S.4
  • 7
    • 33344469917 scopus 로고    scopus 로고
    • Nanostructured films of iron, tin and titanium oxides by chemical vapor deposition
    • DOI 10.1016/j.tsf.2005.07.249, PII S0040609005011156, Selected Papers from the 5th International Conference on Caotings on Glass (ICCG5)
    • S. Mathur, V. Sivakov, H. Shen, S. Barth, C. Cavelius, A. Nilsson, and P. Kuhn, Thin Solid Films 0040-6090 502, 88 (2006). 10.1016/j.tsf.2005.07.249 (Pubitemid 43290037)
    • (2006) Thin Solid Films , vol.502 , Issue.1-2 , pp. 88-93
    • Mathur, S.1    Sivakov, V.2    Shen, H.3    Barth, S.4    Cavelius, C.5    Nilsson, A.6    Kuhn, P.7
  • 9
    • 34548835764 scopus 로고    scopus 로고
    • 2 thin film on the glass substrate deposited by the spray pyrolysis technique
    • DOI 10.1016/j.tsf.2007.03.128, PII S0040609007004610
    • K. Murakami, K. Nakajima, and S. Kaneko, Thin Solid Films 0040-6090 515, 8632 (2007). 10.1016/j.tsf.2007.03.128 (Pubitemid 47444355)
    • (2007) Thin Solid Films , vol.515 , Issue.24 SPEC. ISS. , pp. 8632-8636
    • Murakami, K.1    Nakajima, K.2    Kaneko, S.3
  • 11
    • 0000722320 scopus 로고    scopus 로고
    • Transmission electron microscopy investigation of tin sub-oxide nucleation upon SnO2 deposition on silicon
    • DOI 10.1063/1.115970, PII S0003695196037096
    • C. Alfonso, A. Chara, A. Armigliato, and D. Narducci, Appl. Phys. Lett. 0003-6951 68, 1207 (1996). 10.1063/1.115970 (Pubitemid 126684131)
    • (1996) Applied Physics Letters , vol.68 , Issue.9 , pp. 1207-1208
    • Alfonso, C.1    Charai, A.2    Armigliato, A.3    Narducci, D.4
  • 12
    • 33745899024 scopus 로고    scopus 로고
    • 2 thin films by atomic layer deposition and chemical vapour deposition: A comparative study
    • DOI 10.1016/j.tsf.2006.02.031, PII S0040609006002859
    • J. Sundqvist, J. Lu, M. Ottosson, and A. Hrsta, Thin Solid Films 0040-6090 514, 63 (2006). 10.1016/j.tsf.2006.02.031 (Pubitemid 44043131)
    • (2006) Thin Solid Films , vol.514 , Issue.1-2 , pp. 63-68
    • Sundqvist, J.1    Lu, J.2    Ottosson, M.3    Harsta, A.4
  • 14
    • 33845446722 scopus 로고    scopus 로고
    • 2 thin films grown by chloride-based atomic layer deposition
    • DOI 10.1016/j.apsusc.2005.12.133, PII S0169433205017952
    • D. R. G. Mitchell, A. Aidla, and J. Aarik, Appl. Surf. Sci. 0169-4332 253, 606 (2006). 10.1016/j.apsusc.2005.12.133 (Pubitemid 44894183)
    • (2006) Applied Surface Science , vol.253 , Issue.2 , pp. 606-617
    • Mitchell, D.R.G.1    Aidla, A.2    Aarik, J.3
  • 17
    • 0031168751 scopus 로고    scopus 로고
    • 0142-2421, 10.1002/(SICI)1096-9918(199706)25:6<430::AID-SIA254>3.0. CO;2-7
    • P. J. Cumpson and M. P. Seah, Surf. Interface Anal. 0142-2421 25, 430 (1997). 10.1002/(SICI)1096-9918(199706)25:6<430::AID-SIA254>3.0.CO;2-7
    • (1997) Surf. Interface Anal. , vol.25 , pp. 430
    • Cumpson, P.J.1    Seah, M.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.