Ultraviolet laser crystallized ZnO:Al films on sapphire with high Hall mobility for simultaneous enhancement of conductivity and transparency

Applied Physics Letters

Volumn 104, Issue 20, 2014, Pages

  Nian, Qiong ^a,b   Zhang, Martin Y ^a,b   Schwartz, Bradley D ^c   Cheng, Gary J ^a,b  

^a SCHOOL OF INDUSTRIAL ENGINEERING   (United States)

^b Purdue University   (United States)

^c GOODRICH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRON MOBILITY; FILM GROWTH; GRAIN BOUNDARIES; GRAIN GROWTH; HALL MOBILITY; OPTICAL FILMS; PULSED LASER DEPOSITION; SAPPHIRE; ULTRAVIOLET LASERS; X RAY DIFFRACTION; ZINC OXIDE;

ELECTRON TRAP DENSITY; FREE CARRIER ABSORPTION; GRAIN BOUNDARY DENSITIES; LASER CRYSTALLIZATION; MORPHOLOGICAL CHARACTERIZATION; OPTOELECTRONIC MEASUREMENTS; TRANSMITTANCE SPECTRA; TRANSPARENT CONDUCTIVE OXIDE (TCOS);

TRANSPARENCY;

EID: 84901469073     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4879643     Document Type: Article

References (46)

1. M. Y. Zhang and G. J. Cheng, Appl. Phys. Lett. 99 (5), 051904 (2011). 10.1063/1.3622645
2. T. Minami, S. Suzuki, and T. Miyata, Thin Solid Films 398-399 (0), 53 (2001). 10.1016/S0040-6090(01)01303-7
3. S. Takata, T. Minami, and H. Nanto, Thin Solid Films 135 (2), 183 (1986). 10.1016/0040-6090(86)90125-2
4. W.-J. Jeong and G.-C. Park, Sol. Energy Mater. Sol. Cells 65 (1-4), 37 (2001). 10.1016/S0927-0248(00)00075-1
5. H. Kim, C. M. Gilmore, J. S. Horwitz, A. Piqué, H. Murata, G. P. Kushto, R. Schlaf, Z. H. Kafafi, and D. B. Chrisey, Appl. Phys. Lett. 76 (3), 259 (2000). 10.1063/1.125740
6. T. Ohgaki, Y. Kawamura, T. Kuroda, N. Ohashi, Y. Adachi, T. Tsurumi, F. Minami, and H. Haneda, Key Eng. Mater. 248, 91 (2003). 10.4028/www.scientific. net/KEM.248.91
7. K. Hirohata, N. Oka, Y. Sato, I. Yamamoto, and Y. Shigesato, in " Layer-by-layer Self-assembly of Unilamellar Nanosheet Crystallites of Ruthenium Oxides " in Transparent Conductors and Semiconductors for Optoelectronics, edited by J. D. Perkins, T. O. Mason, J. F. Wager, and Y. Shigesato (Mater. Res. Soc. Symp. Proc. Vol. 1109E, Warrendale, PA, 2009), B03-21.
8. J. J. Berry, D. S. Ginley, and P. E. Burrows, Appl. Phys. Lett. 92 (19), 193304 (2008). 10.1063/1.2917565
9. G. Ma, D. Li, H. Ma, J. Shen, C. Wu, J. Ge, S. Hu, and N. Dai, Appl. Phys. Lett. 93 (21), 211101 (2008). 10.1063/1.3036708
10. S. Cornelius, M. Vinnichenko, N. Shevchenko, A. Rogozin, A. Kolitsch, and W. Möller, Appl. Phys. Lett. 94 (4), 042103 (2009). 10.1063/1.3074373
11. H. Tanaka, K. Ihara, T. Miyata, H. Sato, and T. Minami, J. Vac. Sci. Technol., A 22 (4), 1757 (2004). 10.1116/1.1763903
12. H. Agura, A. Suzuki, T. Matsushita, T. Aoki, and M. Okuda, Thin Solid Films 445 (2), 263 (2003). 10.1016/S0040-6090(03)01158-1
13. R. J. Mendelsberg, S. H. N. Lim, Y. K. Zhu, J. Wallig, D. J. Milliron, and A. Anders, J. Phys. D: Appl. Phys. 44 (23), 232003 (2011). 10.1088/0022-3727/44/23/232003
14. C. Guillén and J. Herrero, Vacuum 84 (7), 924 (2010). 10.1016/j.vacuum.2009.12.015
15. K. Matsubara, P. Fons, K. Iwata, A. Yamada, and S. Niki, Thin Solid Films 422 (1-2), 176 (2002). 10.1016/S0040-6090(02)00965-3
16. A. V. Singh, R. M. Mehra, N. Buthrath, A. Wakahara, and A. Yoshida, J. Appl. Phys. 90 (11), 5661 (2001). 10.1063/1.1415544
17. Z. Zhang, C. Bao, S. Ma, and S. Hou, Appl. Surf. Sci. 257 (17), 7893 (2011). 10.1016/j.apsusc.2011.04.070
18. D. C. Look, C. Coşkun, B. Claflin, and G. C. Farlow, Phys. B: Condens. Matter 340-342 (0), 32 (2003). 10.1016/j.physb.2003.09.188
19. R. J. Lad, P. D. Funkenbusch, and C. R. Aita, J. Vac. Sci. Technol. 17 (4), 808 (1980). 10.1116/1.570565
20. M. A. Al-Maghrabi, M. F. Al-Kuhaili, S. M. A. Durrani, and I. A. Bakhtiari, J. Vac. Sci. Technol., A 27 (2), 276 (2009). 10.1116/1.3072512
21. L. Ding, S. Nicolay, J. Steinhauser, U. Kroll, and C. Ballif, Adv. Funct. Mater. 23 (41), 5177 (2013). 10.1002/adfm.201203541
22. L. Ding, M. Boccard, G. Bugnon, M. Benkhaira, S. Nicolay, M. Despeisse, F. Meillaud, and C. Ballif, Sol. Energy Mater. Sol. Cells 98 (0), 331 (2012). 10.1016/j.solmat.2011.11.033
23. M. Y. Zhang, Q. Nian, and G. J. Cheng, Appl. Phys. Lett. 100 (15), 151902 (2012). 10.1063/1.3702460
24. Y. Geng, Z. Y. Xie, S. S. Xu, Q. Q. Sun, S. J. Ding, H. L. Lu, and D. W. Zhang, ECS J. Solid State Sci. Technol. 1 (3), N45 (2012). 10.1149/2.015203jss
25. M. Y. Zhang, Q. Nian, Y. Shin, and G. J. Cheng, J. Appl. Phys. 113 (19), 193506 (2013). 10.1063/1.4805039
26. F. C. M. van de Pol, F. R. Blom, and Th. J. A. Popma, Thin Solid Films 204 (2), 349 (1991). 10.1016/0040-6090(91)90074-8
27. J. A. Thornton, J. Vac. Sci. Technol. 11 (4), 666 (1974). 10.1116/1.1312732
28. O. Bamiduro, H. Mustafa, R. Mundle, R. B. Konda, and A. K. Pradhan, Appl. Phys. Lett. 90 (25), 252108 (2007). 10.1063/1.2749836
29. T. Sahoo, J.-W. Ju, V. Kannan, J. S. Kim, Y.-T. Yu, M.-S. Han, Y.-S. Park, and I.-H. Lee, Mater. Res. Bull. 43 (3), 502 (2008). 10.1016/j. materresbull.2007.11.015
30. Y. Hwang, H. Kim, and Y. Um, Curr. Appl. Phys. 12, S76 (2012). 10.1016/j.cap.2012.05.021
31. J. Zhang and W. Que, Sol. Energy Mater. Sol. Cells 94 (12), 2181 (2010). 10.1016/j.solmat.2010.07.009
32. A. Aprilia, P. Wulandari, V. Suendo, Herman, R. Hidayat, A. Fujii, and M. Ozaki, Sol. Energy Mater. Sol. Cells 111, 181 (2013). 10.1016/j.solmat.2012.12. 033
33. K. Ellmer, in Transparent Conductive Zinc Oxide, edited by K. Ellmer, A. Klein, and B. Rech (Springer Berlin Heidelberg, 2008), Vol. 104, p. 35.
34. Z. Zhan, J. Zhang, Q. Zheng, D. Pan, J. Huang, F. Huang, and Z. Lin, Cryst. Growth Des. 11 (1), 21 (2011). 10.1021/cg101216z
35. J. G. Lu, Z. Z. Ye, Y. J. Zeng, L. P. Zhu, L. Wang, J. Yuan, B. H. Zhao, and Q. L. Liang, J. Appl. Phys. 100 (7), 073714 (2006). 10.1063/1.2357638
36. A. E. Delahoy and S. Guo, Handbook of Photovoltaic Science and Engineering (John Wiley & Sons, Ltd, 2011), p. 716.
37. T. Minami, MRS Bull. 25 (08), 38 (2000). 10.1557/mrs2000.149
38. J. Y. W. Seto, J. Appl. Phys. 46 (12), 5247 (1975). 10.1063/1.321593
39. G. Baccarani, B. Riccò, and G. Spadini, J. Appl. Phys. 49 (11), 5565 (1978). 10.1063/1.324477
40. R. L. Petritz, Phys. Rev. 104 (6), 1508 (1956). 10.1103/PhysRev.104.1508
41. H. Hagendorfer, K. Lienau, S. Nishiwaki, C. M. Fella, L. Kranz, A. R. Uhl, D. Jaeger, L. Luo, C. Gretener, S. Buecheler, Y. E. Romanyuk, and A. N. Tiwari, Adv. Mater. 26 (4), 632 (2014). 10.1002/adma.201303186
42. Z. Ben Ayadi, L. El Mir, K. Djessas, and S. Alaya, Mater. Sci. Eng., C 28 (5-6), 613 (2008). 10.1016/j.msec.2007.10.006
43. D. Dimova-Malinovska, N. Tzenov, M. Tzolov, and L. Vassilev, Mater. Sci. Eng., B 52 (1), 59 (1998). 10.1016/S0921-5107(97)00210-9
44. T. Ootsuka, Z. Liu, M. Osamura, Y. Fukuzawa, R. Kuroda, Y. Suzuki, N. Otogawa, T. Mise, S. Wang, Y. Hoshino, Y. Nakayama, H. Tanoue, and Y. Makita, Thin Solid Films 476 (1), 30 (2005). 10.1016/j.tsf.2004.06.145
45. Y. Okuhara, T. Kato, H. Matsubara, N. Isu, and M. Takata, Thin Solid Films 519 (7), 2280 (2011). 10.1016/j.tsf.2010.11.007
46. T. Dhakal, A. S. Nandur, R. Christian, P. Vasekar, S. Desu, C. Westgate, D. I. Koukis, D. J. Arenas, and D. B. Tanner, Sol. Energy 86 (5), 1306 (2012). 10.1016/j.solener.2012.01.022