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Volumn 257, Issue 17, 2011, Pages 7893-7899

Effect of crystallinity of ZnO buffer layer on the properties of epitaxial (ZnO:Al)/(ZnO:Ga) bi-layer films deposited on c-sapphire substrate

Author keywords

AZO; Bi layer film; Defect density; GZO; HRTEM; Stacking faults

Indexed keywords

ALUMINA; ALUMINUM OXIDE; BISMUTH COMPOUNDS; BUFFER LAYERS; DEFECT DENSITY; GALLIUM COMPOUNDS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; II-VI SEMICONDUCTORS; PULSED LASER DEPOSITION; SAPPHIRE; STACKING FAULTS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION;

EID: 79957476562     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.04.070     Document Type: Article
Times cited : (28)

References (29)
  • 1
    • 68049093183 scopus 로고    scopus 로고
    • Thin film epitaxy and structure property correlations for non-polar ZnO films
    • P. Pant, J.D. Budai, R. Aggarwal, R.J. Narayan, and J. Narayan Thin film epitaxy and structure property correlations for non-polar ZnO films Acta Mater. 57 2009 4426 4431
    • (2009) Acta Mater. , vol.57 , pp. 4426-4431
    • Pant, P.1    Budai, J.D.2    Aggarwal, R.3    Narayan, R.J.4    Narayan, J.5
  • 2
    • 33645139428 scopus 로고    scopus 로고
    • Absence of ferromagnetism in Al-doped Zn0.9Co0.10O diluted magnetic semiconductors
    • J. Alaria, H. Bieber, S. Colis, G. Schmerber, and A. Dinia Absence of ferromagnetism in Al-doped Zn0.9Co0.10O diluted magnetic semiconductors Appl. Phys. Lett. 88 2006 112503
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 112503
    • Alaria, J.1    Bieber, H.2    Colis, S.3    Schmerber, G.4    Dinia, A.5
  • 3
    • 60949091424 scopus 로고    scopus 로고
    • Roomerature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method
    • W.F. Yang, Z.G. Liu, D.L. Peng, F. Zhang, H.L. Huang, Y.N. Xie, and Z.Y. Wu Roomerature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method Appl. Surf. Sci. 255 2009 5669 5673
    • (2009) Appl. Surf. Sci. , vol.255 , pp. 5669-5673
    • Yang, W.F.1    Liu, Z.G.2    Peng, D.L.3    Zhang, F.4    Huang, H.L.5    Xie, Y.N.6    Wu, Z.Y.7
  • 4
    • 33847179491 scopus 로고    scopus 로고
    • Effect of thickness on structural, electrical, and optical properties of ZnO: Al films deposited by pulsed laser deposition
    • B.Z. Dong, G.J. Fang, J.F. Wang, W.J. Guan, and X.Z. Zhao Effect of thickness on structural, electrical, and optical properties of ZnO: Al films deposited by pulsed laser deposition J. Appl. Phys. 101 2007 033713
    • (2007) J. Appl. Phys. , vol.101 , pp. 033713
    • Dong, B.Z.1    Fang, G.J.2    Wang, J.F.3    Guan, W.J.4    Zhao, X.Z.5
  • 7
    • 34547603682 scopus 로고    scopus 로고
    • Electron and hole traps in N-doped ZnO grown on p-type Si by metalorganic chemical vapor deposition
    • Z.Q. Fang, B. Claflin, D.C. Look, L.L. Kerr, and X.N. Li Electron and hole traps in N-doped ZnO grown on p-type Si by metalorganic chemical vapor deposition J. Appl. Phys. 102 2007 023714
    • (2007) J. Appl. Phys. , vol.102 , pp. 023714
    • Fang, Z.Q.1    Claflin, B.2    Look, D.C.3    Kerr, L.L.4    Li, X.N.5
  • 8
    • 0037132304 scopus 로고    scopus 로고
    • Origin and consequences of a high stacking fault density in epitaxial ZnO layers
    • D. Gerthsen, D. Litvinov, T. Gruber, C. Kirchner, and A. Waag Origin and consequences of a high stacking fault density in epitaxial ZnO layers Appl. Phys. Lett. 81 2002 3972 3974
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 3972-3974
    • Gerthsen, D.1    Litvinov, D.2    Gruber, T.3    Kirchner, C.4    Waag, A.5
  • 10
    • 34247579135 scopus 로고    scopus 로고
    • Structural, electrical, and optical properties of transparent conductive ZnO: Ga films prepared by DC reactive magnetron sputtering
    • Q.B. Ma, Z.Z. Ye, H.P. He, S.H. Hu, J.R. Wang, L.P. Zhu, Y.Z. Zhang, and B.H. Zhao Structural, electrical, and optical properties of transparent conductive ZnO: Ga films prepared by DC reactive magnetron sputtering J. Cryst. Growth 304 2007 64 68
    • (2007) J. Cryst. Growth , vol.304 , pp. 64-68
    • Ma, Q.B.1    Ye, Z.Z.2    He, H.P.3    Hu, S.H.4    Wang, J.R.5    Zhu, L.P.6    Zhang, Y.Z.7    Zhao, B.H.8
  • 13
    • 69249174172 scopus 로고    scopus 로고
    • A Laser-direct photoetching of metal thin film for the electrode of transistor
    • H. Lee, H. Shin, Y. Jeong, J. Moon, and M. Lee A Laser-direct photoetching of metal thin film for the electrode of transistor Appl. Phys. Lett. 95 2009 071104
    • (2009) Appl. Phys. Lett. , vol.95 , pp. 071104
    • Lee, H.1    Shin, H.2    Jeong, Y.3    Moon, J.4    Lee, M.5
  • 14
    • 77953137223 scopus 로고    scopus 로고
    • Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread
    • K. Jung, W.K. Choi, S.J. Yoon, H.J. Kim, and J.W. Choi Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread Appl. Surf. Sci. 256 2010 6219 6223
    • (2010) Appl. Surf. Sci. , vol.256 , pp. 6219-6223
    • Jung, K.1    Choi, W.K.2    Yoon, S.J.3    Kim, H.J.4    Choi, J.W.5
  • 15
    • 77955309198 scopus 로고    scopus 로고
    • Fabrication and characterization of magnetron sputtered arsenic doped p-type ZnO epitaxial thin films
    • A. Kumar, M. Kumar, and B.P. Singh Fabrication and characterization of magnetron sputtered arsenic doped p-type ZnO epitaxial thin films Appl. Surf. Sci. 256 2010 7200 7203
    • (2010) Appl. Surf. Sci. , vol.256 , pp. 7200-7203
    • Kumar, A.1    Kumar, M.2    Singh, B.P.3
  • 16
    • 77954178514 scopus 로고    scopus 로고
    • Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films
    • T. Yamada, H. Makino, N. Yamamoto, and T. Yamamoto Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films J. Appl. Phys. 107 2010 123534
    • (2010) J. Appl. Phys. , vol.107 , pp. 123534
    • Yamada, T.1    Makino, H.2    Yamamoto, N.3    Yamamoto, T.4
  • 17
    • 49749102769 scopus 로고    scopus 로고
    • Characterization of microstructure and defects in epitaxial ZnO (1 1 (2)over-bar 0) films on Al2O3 (1 (1)over-bar 0 2) substrates by transmission electron microscopy
    • J.W. Lee, S.K. Han, S.K. Hong, J.Y. Lee, and T. Yao Characterization of microstructure and defects in epitaxial ZnO (1 1 (2)over-bar 0) films on Al2O3 (1 (1)over-bar 0 2) substrates by transmission electron microscopy J. Cryst. Growth 310 2008 4102 4109
    • (2008) J. Cryst. Growth , vol.310 , pp. 4102-4109
    • Lee, J.W.1    Han, S.K.2    Hong, S.K.3    Lee, J.Y.4    Yao, T.5
  • 18
    • 0347134695 scopus 로고    scopus 로고
    • Electrical and optical properties of defects and impurities in ZnO
    • D.C. Look, C. Coskun, B. Claflin, and G.C. Farlow Electrical and optical properties of defects and impurities in ZnO Physica B 340 2003 32 38
    • (2003) Physica B , vol.340 , pp. 32-38
    • Look, D.C.1    Coskun, C.2    Claflin, B.3    Farlow, G.C.4
  • 19
    • 77950298440 scopus 로고    scopus 로고
    • Effect of a ZnO buffer layer on the properties of Ga-doped ZnO thin films grown on Al2O3 (0001) substrates at a low growth temperature of 250 degrees C
    • S.W. Shin, K.U. Sim, S.M. Pawar, A.V. Moholkar, I.O. Jung, J.H. Yun, J.H. Moon, J.H. Kim, and J.Y. Lee Effect of a ZnO buffer layer on the properties of Ga-doped ZnO thin films grown on Al2O3 (0001) substrates at a low growth temperature of 250 degrees C J. Cryst. Growth 312 2010 1551 1556
    • (2010) J. Cryst. Growth , vol.312 , pp. 1551-1556
    • Shin, S.W.1    Sim, K.U.2    Pawar, S.M.3    Moholkar, A.V.4    Jung, I.O.5    Yun, J.H.6    Moon, J.H.7    Kim, J.H.8    Lee, J.Y.9
  • 21
  • 23
    • 71649100273 scopus 로고    scopus 로고
    • Formation of a two-dimensional electron gas in ZnO/MgZnO single heterostructures and quantum wells
    • M. Brandt, H. von Wenckstern, G. Benndorf, H. Hochmuth, M. Lorenz, and M. Grundmann Formation of a two-dimensional electron gas in ZnO/MgZnO single heterostructures and quantum wells Thin Solid Films 518 2009 1048 1052
    • (2009) Thin Solid Films , vol.518 , pp. 1048-1052
    • Brandt, M.1    Von Wenckstern, H.2    Benndorf, G.3    Hochmuth, H.4    Lorenz, M.5    Grundmann, M.6
  • 24
  • 25
    • 70350115971 scopus 로고    scopus 로고
    • Microstructural characteristics and crystallographic evolutions of Ga-doped ZnO films grown on sapphire substrates at high temperatures by RF magnetron sputtering
    • J.H. Lee, Y.Y. Kim, H.K. Cho, and J.Y. Lee Microstructural characteristics and crystallographic evolutions of Ga-doped ZnO films grown on sapphire substrates at high temperatures by RF magnetron sputtering J. Cryst. Growth 311 2009 4641 4646
    • (2009) J. Cryst. Growth , vol.311 , pp. 4641-4646
    • Lee, J.H.1    Kim, Y.Y.2    Cho, H.K.3    Lee, J.Y.4
  • 26
    • 72449144276 scopus 로고    scopus 로고
    • Nonpolar ZnO film growth and mechanism for anisotropic in-plane strain relaxation
    • P. Pant, J.D. Budai, and J. Narayan Nonpolar ZnO film growth and mechanism for anisotropic in-plane strain relaxation Acta Mater. 58 2010 1097 1103
    • (2010) Acta Mater. , vol.58 , pp. 1097-1103
    • Pant, P.1    Budai, J.D.2    Narayan, J.3
  • 27
    • 0141988528 scopus 로고    scopus 로고
    • Epitaxial growth and properties of Ga-doped ZnO films grown by pulsed laser deposition
    • Z.F. Liu, F.K. Shan, Y.X. Li, B.C. Shin, and Y.S. Yu Epitaxial growth and properties of Ga-doped ZnO films grown by pulsed laser deposition J. Cryst. Growth 259 2003 130 136
    • (2003) J. Cryst. Growth , vol.259 , pp. 130-136
    • Liu, Z.F.1    Shan, F.K.2    Li, Y.X.3    Shin, B.C.4    Yu, Y.S.5
  • 28
    • 12344330272 scopus 로고    scopus 로고
    • Energetics and electronic structure of stacking faults in ZnO
    • Y.F. Yan, G.M. Dalpian, M.M. Al-Jassim, and S.H. Wei Energetics and electronic structure of stacking faults in ZnO Phys. Rev. B 70 2004 193206
    • (2004) Phys. Rev. B , vol.70 , pp. 193206
    • Yan, Y.F.1    Dalpian, G.M.2    Al-Jassim, M.M.3    Wei, S.H.4
  • 29
    • 67349264927 scopus 로고    scopus 로고
    • Effects of deposition temperature on the crystallinity of Ga-doped ZnO thin films on glass substrates prepared by sputtering method
    • Y.J. Park, H.N. Kim, and H.H. Shin Effects of deposition temperature on the crystallinity of Ga-doped ZnO thin films on glass substrates prepared by sputtering method Appl. Surf. Sci. 255 2009 7532 7536
    • (2009) Appl. Surf. Sci. , vol.255 , pp. 7532-7536
    • Park, Y.J.1    Kim, H.N.2    Shin, H.H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.