Packaging commercial CMOS chips for lab on a chip integration

Lab on a Chip

Volumn 14, Issue 10, 2014, Pages 1753-1766

  Datta Chaudhuri, Timir ^a   Abshire, Pamela ^a   Smela, Elisabeth ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL OXIDE; BIOMATERIAL; METAL; OXIDE; PARYLENE; POLY(3,4-ETHYLENEDIOXYTHIOPHENE)-POLY(STYRENESULFONATE); POLYMER; POLYSTYRENE DERIVATIVE; THIOPHENE DERIVATIVE; XYLENE;

ARTICLE; BRAIN CELL; CELL ADHESION; CELL CULTURE; CELL VIABILITY; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR; CONTROLLED STUDY; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTRODE; ELECTRONICS; ENCAPSULATION; FILM; HEART MUSCLE CELL; HUMAN; HUMAN CELL; HUMIDITY; INFORMATION PROCESSING; INSTRUMENT STERILIZATION; INTEGRATED CIRCUIT; LAB ON A CHIP; MICROFLUIDICS; MICROTECHNOLOGY; PACKAGING; PACKAGING MATERIAL; PETRI DISH; PLURIPOTENT STEM CELL; POWER SUPPLY; PRIORITY JOURNAL; SEMICONDUCTOR; THERMAL CONDUCTIVITY; ULTRAVIOLET RADIATION; AMPLIFIER; CELL DIFFERENTIATION; CELL SURVIVAL; CHEMISTRY; CYTOLOGY; DEVICES; ELECTRIC CAPACITANCE; EQUIPMENT DESIGN; MICROFLUIDIC ANALYSIS; SURFACE PROPERTY;

AMPLIFIERS, ELECTRONIC; BIOCOMPATIBLE MATERIALS; CELL ADHESION; CELL DIFFERENTIATION; CELL SURVIVAL; ELECTRIC CAPACITANCE; ELECTRODES; EQUIPMENT DESIGN; HUMANS; INDUCED PLURIPOTENT STEM CELLS; LAB-ON-A-CHIP DEVICES; METALS; MICROFLUIDIC ANALYTICAL TECHNIQUES; MYOCYTES, CARDIAC; OXIDES; POLYMERS; POLYSTYRENES; SEMICONDUCTORS; SURFACE PROPERTIES; THIOPHENES; XYLENES;

EID: 84898890326     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/c4lc00135d     Document Type: Article

References (63)

1. A. Folch, Introduction to BioMEMS, CRC Press, Boca Raton, Fl, 2012
2. M. A. Burns B. N. Johnson S. N. Brahmasandra K. Handique J. R. Webster M. Krishnan T. S. Sammarco P. M. Man D. Jones D. Heldsinger C. H. Mastrangelo D. T. Burke An integrated nanoliter DNA analysis device Science 1998 282 484 487
3. S. C. Terry J. H. Jerman J. B. Angell A gas chromatographic air analyzer fabricated on a silicon wafer IEEE Trans. Electron Devices 1979 26 1880 1886
4. A. Manz N. Graber H. M. Widmer Miniaturized total chemical analysis systems: a novel concept for chemical sensing Sens. Actuators, B 1990 1 244 248
5. F. Heer W. Franks A. Blau S. Taschini C. Ziegler A. Hierlemann H. Baltes CMOS microelectrode array for the monitoring of electrogenic cells Biosens. Bioelectron. 2004 20 358 366
6. H. Lee Y. Liu R. M. Westervelt D. Ham IC/microfluidic hybrid system for magnetic manipulation of biological cells IEEE J. Solid-State Circuits 2006 41 1471 1480
7. G. K. Fedder, CMOS-based sensors, in IEEE Sensors Conf., IEEE, Irvine, California, 2005
8. D. Braeken D. Jans R. Huys A. Stassen N. Collaert L. Hoffman W. Eberle P. Peumans G. Callewaert Open-cell recording of action potentials using active electrode arrays Lab Chip 2012 12 4397 4402
9. H. Baltes O. Brand CMOS-based microsensors and packaging Sens. Actuators, A 2001 92 1 9
10. Y. Huang and A. J. Mason, Lab-on-CMOS: Integrating microfluidics and electrochemical sensor on CMOS, in IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS), Kaohsiung, Taiwan, 2011, pp. 690-693
11. H. Wang A. Mahdavi D. A. Tirrell A. Hajimiri A magnetic cell-based sensor Lab Chip 2012 12 4465 4471
12. H. Lee Y. Liu D. Ham R. M. Westervelt Integrated cell manipulation system-CMOS/microfluidic hybrid Lab Chip 2007 7 331 337
13. B. Zhang Q. Dong C. E. Korman Z. Li M. E. Zaghloul Flexible packaging of solid-state integrated circuit chips with elastomeric microfluidics Sci. Rep. 2013 3 1098
14. L. Hartley K. V. I. S. Kaler O. Yadid-Pecht Hybrid integration of an active pixel sensor and microfluidics for cytometry on a chip IEEE Trans. Circuits Syst. I 2007 54 99 110
15. S. Joo R. B. Brown Chemical sensors with integrated electronics Chem. Rev. 2008 108 638 651
16. A. H. D. Graham J. Robbins C. R. Bowen J. Taylor Commercialisation of CMOS integrated circuit technology in multi-electrode arrays for neuroscience and cell-based biosensors Sensors 2011 11 4943 4971
17. D. Barrettino, Design considerations and recent advances in CMOS-based microsystems for point-of-care clinical diagnostics, in IEEE Int. Symp. on Circuits and Systems (ISCAS), Kos, Greece, 2006, pp. 4359-4362
18. Y. Adiguzel H. Kulah CMOS Cell Sensors for Point-of-Care Diagnostics Sensors 2012 12 10042 10066
19. R. Huys D. Braeken D. Jans A. Stassen N. Collaert J. Wouters J. Loo S. Severi F. Vleugels G. Callewaert K. Verstreken C. Bartic W. Eberle Single-cell recording and stimulation with a 16k micro-nail electrode array integrated on a 0.18 μm CMOS chip Lab Chip 2012 12 1274 1280
20. E. Smela, M. Christophersen, S. B. Prakash, M. Urdaneta, M. Dandin and P. Abshire, Integrated cell-based sensors and cell clinics utilizing conjugated polymer actuators, in Proc. SPIE 6524, 14th Annual Int. Symp. on Smart Structures and Materials, Electroactive Polymer Actuators and Devices (EAPAD), ed., Y. Bar-Cohen, SPIE, San Diego, CA, 2007, 65240G
21. E. Anderson, J. Daniels, H. Yu, T. Lee and N. Pourmand, A label-free CMOS DNA microarray based on charge sensing, in IEEE Instrumentation and Measurement Technology Conference Proceedings, IMTC, Victoria, BC, Canada, 2008, pp. 1631-1636
22. J. A. Chediak Z. Luo J. Seo N. Cheung L. P. Lee T. D. Sands Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems Sens. Actuators, A 2004 111 1 7
23. M. Dandin P. Abshire E. Smela Optical filtering technologies for integrated fluorescence sensors Lab Chip 2007 7 955 977
24. H. E. Ayliffe A. Bruno Frazier R. D. Rabbitt Electric impedance spectroscopy using microchannels with integrated metal electrodes J. Microelectromech. Syst. 1999 8 50 57
25. F. Heer S. Hafizovic W. Franks A. Blau C. Ziegler A. Hierlemann CMOS microelectrode array for bidirectional interaction with neuronal networks IEEE J. Solid-State Circuits 2006 41 1620 1629
26. H. Ji, M. Dandin, E. Smela and P. Abshire, Integrated fluorescence sensing for lab-on-a-chip devices, in IEEE/NLM Life Science Systems & Applications Workshop, Bethesda, MD, 2006
27. S. J. B. Yoo, CMOS-compatible silicon photonic integrated systems in future computing and communication systems, in OptoeElectronics and Communications Conference (OECC), 2010 15th, Sapporo, Japan, 2010, pp. 510-511
28. Y. Huang A. J. Mason Lab-on-CMOS integration of microfluidics and electrochemical sensors Lab Chip 2013 13 3929 3934
29. MicroChemicals GmbH, Hardbake of photoresist structures, Application Note, Jan. 27th 2010, Retrieved from http://www.microchemicals.eu/technical- information
30. J. T. C. Yeh K. R. Grebe Patterning of polyparaxylylenes by reactive ion etching J. Vac. Sci. Technol., A 1983 1 604 608
31. N. Majid S. Dabral J. F. McDonald The parylene-aluminum multilayer interconnection system for wafer scale integration and wafer scale hybrid packaging J. Electron. Mater. 1989 18 301 311
32. S. H. Kim S. W. Na N. E. Lee Y. W. Nam Y.-H. Kim Effect of surface roughness on the adhesion properties of Cu/Cr films on polyimide substrate treated by inductively coupled oxygen plasma Surf. Coat. Technol. 2005 200 2072 2079
33. P. Rezai P. R. Selvaganapathy G. R. Wohl Plasma enhanced bonding of polydimethylsiloxane with parylene and its optimization J. Micromech. Microeng. 2011 21 065024
34. T. Prodromakis, K. Michelakisy, T. Zoumpoulidis, R. Dekker and C. Toumazou, in IEEE Sensors Conf., IEEE, Christchurch, New Zealand, 2009, pp. 791-794
35. Cotronics Corp., Durapot™ Epoxies, Data Sheet, 1/29/2013, Retrieved from http://www.cotronics.com/catalog/860.pdf
36. R. R. Harrison C. Charles A low-power low-noise CMOS amplifier for neural recording applications IEEE J. Solid-State Circuits 2003 38 958 965
37. S. J. Wilks S. M. Richardson-Burns J. L. Hendricks D. C. Martin K. J. Otto Poly(3,4-ethylenedioxythiophene) as a micro-neural interface material for electrostimulation Front. Neuroeng. 2009 2 7
38. M. Urdaneta E. Smela Parasitic trap cancellation using multiple frequency dielectrophoresis, demonstrated by loading cells into cages Lab Chip 2008 8 550 556
39. S. B. Prakash and P. Abshire, A Fully Differential Rail-to-Rail Capacitance Measurement Circuit for Integrated Cell Sensing, in Sensors, 2007 IEEE, 2007, pp. 1444-1447
40. A. H. D. Graham C. R. Bowen S. M. Surguy J. Robbins J. Taylor New prototype assembly methods for biosensor integrated circuits Med. Eng. Phys. 2011 33 973 979
41. L. Li and A. J. Mason, Post-CMOS parylene packaging for on-chip biosensor arrays, in IEEE Sensors Conf., Kona, HI, 2010, pp. 1613-1616
42. P. Abshire, A. Bermak, R. Bemer, G. Cauwenberghs, S. Chen, J. B. Christen, T. Constandinou, E. Culurciello, M. Dandin, T. Datta, T. Delbrück, P. Dudek, A. Eftekhar, R. Etienne-Cummings, G. Indiveri, M. K. Law, B. Linares-Barranco, J. Tapson, W. Tang and Y. Zhai, Confession session: Learning from others mistakes, in IEEE Int. Symp. on Circuits and Systems (ISCAS), Rio de Janeiro, Brazil, 2011, pp. 1149-1162
43. V. Agarwal, Integrated CMOS Microsystems for Carbon Nanotubes Based Sensing and Integrated Micro-array for Multiplexed Analyte Detection Using Electro-chemiluminescence, ProQuest, Ann Arbor, MI, 2008
44. M. Dandin, I. D. Jung, M. Piyasena, J. Gallagher, N. Nelson, M. Urdaneta, C. Artis, P. Abshire and E. Smela, Post-CMOS packaging methods for integrated biosensors, in IEEE Sensors Conf., IEEE, Christchurch, New Zealand, 2009, pp. 795-798
45. E. Ghafar-Zadeh M. Sawan D. Therriault Novel direct-write CMOS-based laboratory-on-chip: Design, assembly and experimental results Sens. Actuators, A 2007 134 27 36
46. P. F. Man, D. K. Jones and C. H. Mastrangelo, Microfluidic plastic capillaries on silicon substrates: a new inexpensive technology for bioanalysis chips, in IEEE Tenth Annual International Workshop on Micro Electro Mechanical Systems (MEMS), Nagoya, Japan, 1997, pp. 311-316
47. A. Wu L. Wang E. Jensen R. Mathies B. Boser Modular integration of electronics and microfluidic systems using flexible printed circuit boards Lab Chip 2010 10 519 521
48. N. J. Ho J. Kratochvil G. F. Blackburn J. Janata Encapsulation of polymeric membrane-based ion-selective field effect transistors Sens. Actuators 1983 4 413 421
49. I. Burdallo C. Jimenez-Jorquera C. Fernández-Sánchez A. Baldi Integration of microelectronic chips in microfluidic systems on printed circuit board J. Micromech. Microeng. 2013 22 105022
50. B. Eversmann M. Jenkner F. Hofmann C. Paulus R. Brederlow B. Holzapfl P. Fromherz M. Merz M. Brenner M. Schreiter R. Gabl K. Plehnert M. Steinhauser G. Eckstein D. Schmitt-Landsiedel R. Thewes A 128 x 128 CMOS biosensor array for extracellular recording of neural activity IEEE J. Solid-State Circuits 2003 38 2306 2317
51. R. L. Smith S. D. Collins Micromachined packaging for chemical microsensors IEEE Trans. Electron Devices 1988 35 787 792
52. M. A. Spivack Parylene thin films for radiation applications Rev. Sci. Instrum. 1970 41 1614 1616
53. S. M. Martin, T. D. Strong and R. B. Brown, Design, implementation, and verification of a CMOS-integrated chemical sensor system, in Proc. Int. Conf. on MEMS, NANO and Smart Systems, (ICMENS), Banff, Alberta, Canada, 2004, pp. 379-385
54. J. N. Lee C. Park G. M. Whitesides Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices Anal. Chem. 2003 75 6544 6554
55. D. Henry, F. Jacquet, M. Neyret, X. Baillin, T. Enot, V. Lapras, C. Brunet-Manquat, J. Charbonnier, B. Aventurier and N. Sillon, Through silicon vias technology for CMOS image sensors packaging, in IEEE Electronic Components and Technology Conf., (ECTC), Lake Buena Vista, FL, 2008, pp. 556-562
56. A. E. Franke, D. Bilic, D. T. Chang, P. T. Jones, T. J. King, R. T. Howe and G. C. Johnson, Post-CMOS integration of germanium microstructures, in IEEE Twelfth Annual International Workshop on Micro Electro Mechanical Systems (MEMS), IEEE, Orlando, FL, USA, 1999, pp. 630-637
57. S. Sedky A. Witvrouw H. Bender K. Baert Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers IEEE Trans. Electron Devices 2001 48 377 385
58. J. Frados, Modern plastics encyclopedia, McGraw Hill, NY, USA, 1968
59. D. Ziegler T. Suzuki S. Takeuchi Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of parylene J. Microelectromech. Syst. 2006 15 1477 1482
60. N. Grassie I. G. Macfarlane The thermal degradation of polysiloxanes - I. Poly(dimethylsiloxane) Eur. Polym. J. 1978 14 875 884
61. W. H. Teh U. Durig U. Drechsler C. G. Smith H. J. Guntherodt Effect of low numerical-aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh-aspect-ratio microstereolithography J. Appl. Phys. 2005 97 054907
62. S. B. Graves Statistical quality control of a multistep production process using total process yield Qual. Eng. 1998 11 187 195
63. A. Grisel C. Francis E. Verney G. Mondin Packaging technologies for integrated electrochemical sensors Sens. Actuators 1989 17 285 295