Plasma enhanced bonding of polydimethylsiloxane with parylene and its optimization

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Rezai, Pouya ^a   Selvaganapathy, P Ravi ^a   Wohl, Gregory R ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BOND FORMATION; BURST PRESSURES; CHAMBER PRESSURE; CHEMICAL STRUCTURE; FABRICATION METHOD; GAS FLOWRATE; HIGH TEMPERATURE; MICRO CONTACT PRINTING; MICRO FLUIDIC APPLICATIONS; MICRO-CONTACT; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; PARYLENES; PDMS REPLICA; PDMS SURFACES; PLASMA EXPOSURE; POLYDIMETHYLSILOXANE PDMS; PREPOLYMERS; TAGUCHI; TWO-STEP PROCESS; WEAK BOND;

CHEMICAL BONDS; DESIGN OF EXPERIMENTS; ELECTRON DEVICE MANUFACTURE; FLUIDIC DEVICES; FUNCTIONAL POLYMERS; MICROCHANNELS; MICROFLUIDICS; PRESSURE EFFECTS; SULFUR HEXAFLUORIDE;

SILICONES;

EID: 79957947750     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065024     Document Type: Article

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