Post-CMOS parylene packaging for on-chip biosensor arrays

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 1613-1616

  Li, Lin ^a   Mason, Andrew J ^a  

^a Michigan State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOINTERFACES; BIOLOGICAL AGENTS; BIOMEDICAL SENSORS; BIOSENSOR ARRAYS; CMOS BIOSENSORS; CMOS CHIPS; CMOS INSTRUMENTATION; ELECTRICAL INSULATION; ELECTROCHEMICAL MEASUREMENTS; GOLD ELECTRODES; LIQUID ENVIRONMENT; MICRO-FLUIDIC DEVICES; ON CHIPS; ON-CHIP ELECTRODES; PARYLENES; PIRANHA SOLUTIONS; POST-CMOS; POTASSIUM FERROCYANIDE; REDOX PEAKS;

BIOSENSORS; ELECTRODES; LIQUIDS; PACKAGING; POTASSIUM;

CHIP SCALE PACKAGES;

EID: 79951919448     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690397     Document Type: Conference Paper

References (9)

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