Microfluidic plastic capillaries on silicon substrates: A new inexpensive technology for bioanalysis chips

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 311-316

  Man, P F ^a   Jones, D K ^a   Mastrangelo, C H ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FLOW; FLUIDIC DEVICES; LITHOGRAPHY; POLYCARBONATES; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SUBSTRATES;

MICROFLUIDIC PLASTIC CAPILLARIES; MICROMOULDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030651660     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)