Ellipsometry characterization of polycrystalline ZnO layers with the modeling of carrier concentration gradient: Effects of grain boundary, humidity, and surface texture

Journal of Applied Physics

Volumn 115, Issue 13, 2014, Pages

  Sago, Keisuke ^a   Kuramochi, Hideto ^b   Iigusa, Hitoshi ^b   Utsumi, Kentaro ^b   Fujiwara, Hiroyuki ^a  

^a GIFU UNIVERSITY   (Japan)

^b TOSOH CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARRIER CONCENTRATION; CARRIER MOBILITY; GRAIN GROWTH; MAGNETRON SPUTTERING; OPTICAL MULTILAYERS; SPECTROSCOPIC ELLIPSOMETRY; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; TRANSPORT PROPERTIES; ZINC OXIDE;

CONCENTRATION GRADIENTS; FREE CARRIER ABSORPTION; GRAIN BOUNDARY SCATTERING; POLYCRYSTALLINE LAYERS; POLYCRYSTALLINE ZNO; RF-MAGNETRON SPUTTERING; STRUCTURAL TRANSITIONS; THICKNESS DEPENDENCE;

GRAIN BOUNDARIES;

EID: 84898048653     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4870443     Document Type: Article

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