Large Area, Facile Oxide Nanofabrication via Step-and-Flash Imprint Lithography of Metal-Organic Hybrid Resins

ACS Applied Materials and Interfaces

Volumn 5, Issue 24, 2013, Pages 13113-13123

  Dinachali, Saman Safari ^a,b   Dumond, Jarrett ^a   Saifullah, Mohammad S M ^a   Ansah Antwi, Kwadwo Konadu ^a,b   Ganesan, Ramakrishnan ^c   Thian, Eng San ^b   He, Chaobin ^a,b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c BIRLA INSTITUTE OF TECHNOLOGY AND SCIENCE   (India)

Author keywords

Metal oxides; Metal organic resins; Nanofabrication; Nanolithography; Step and flash nanoimprint lithography

Indexed keywords

COORDINATION COMPLEX; MECHANICAL INTEGRITY; METAL OXIDES; METAL-ORGANIC; METAL-ORGANIC HYBRIDS; NANOIMPRINT TECHNIQUES; OXIDE NANOSTRUCTURES; STEP-AND-FLASH IMPRINT LITHOGRAPHY;

ASPECT RATIO; CALCINATION; CHELATION; COORDINATION REACTIONS; HOMOPOLYMERIZATION; METALS; NANOLITHOGRAPHY; NANOSTRUCTURES; NANOTECHNOLOGY; NIOBIUM OXIDE; OXIDE FILMS; RESINS; SHRINKAGE; TANTALUM OXIDES;

NANOIMPRINT LITHOGRAPHY;

EID: 84891413532     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am404136p     Document Type: Article

References (39)

1. Patzke, G. R.; Zhou, Y.; Kontic, R.; Conrad, F. Angew. Chem., Int. Ed. 2011, 50, 826-859.
2. Reiner, J. W.; Kolpak, A. M.; Segal, Y.; Garrity, K. F.; Ismail-Beigi, S.; Ahn, C. H.; Walker, F. J. Adv. Mater. 2010, 22, 2919-2938.
3. Kamiya, T.; H. Hosono, H. NPG Asia Mater. 2010, 2, 15-22.
4. Tohge, N.; Shinmou, K.; Minami, T. J. Sol-Gel Sci. Technol. 2000, 19, 119-123.
5. Tohge, N.; Shinmou, K.; Minami, T. J. Sol-Gel Sci. Technol. 1994, 2, 581-585.
6. Saifullah, M. S. M.; Subramanian, K. R. V.; Tapley, E.; Kang, D.-J.; Welland, M. E.; Butler, M. Nano Lett. 2003, 3, 1587-1591.
7. Subramanian, K. R. V.; Saifullah, M. S. M.; Tapley, E.; Kang, D.-J.; Welland, M. E.; Butler, M. Nanotechnology 2004, 15, 158-162.
8. Saifullah, M. S. M.; Subramanian, K. R. V.; Kang, D.-J.; Anderson, D.; Huck, W. T. S.; Jones, G. A. C.; Welland, M. E. Adv. Mater. 2005, 17, 1757-1761.
9. Koshida, N.; Ohtaka, K.; Ando, M.; Komuro, M.; Atoda, N. Jpn. J. Appl. Phys. 1989, 28, 2090-2094.
10. Schrift, H. J. Vac. Sci. Technol., B 2008, 26, 458-480.
11. Costner, E. A.; Lin, M. W.; Jen, W.-L.; Willson, C. G. Annu. Rev. Mater. Res. 2009, 39, 155-180.
12. Guo, L. J. Adv. Mater. 2007, 19, 495-513.
13. Dumond, J. J.; Low, H. Y. J. Vac. Sci. Technol., B 2012, 30, 010801.
14. Byeon, K.-J.; Lee, H. Eur. Phys. J.: Appl. Phys. 2012, 59, 10001.
15. Dinachali, S. S.; Saifullah, M. S. M.; Ganesan, R.; Thian, E. S.; He, C. Adv. Funct. Mater. 2013, 23, 2201-2211.
16. Ganesan, R.; Lim, S. H.; Saifullah, M. S. M.; Hussain, H.; Kwok, J. X. Q.; Tse, R. L. X.; Bo, H. A. P.; Low, H. Y. J. Mater. Chem. 2011, 21, 4484-4492.
17. Matsui, S.; Igaku, Y.; Ishigaki, H.; Fujita, J.; Ishida, M.; Ochiai, Y.; Namatsu, H.; Komuro, M. J. Vac. Sci. Technol., B 2003, 21, 688-692.
18. Kwon, S. J.; Park, J. H.; Park, J. G. J. Electroceram. 2006, 17, 455-459.
19. Hampton, M. J.; Williams, S. S.; Zhou, Z.; Nunes, J.; Ko, D. H.; Templeton, J. L.; Samulski, E. T.; DeSimone, J. M. Adv. Mater. 2008, 20, 2667-2673.
20. Yang, K.-Y.; Yoon, K.-M.; Choi, K. W.; Lee, H. Microelectron. Eng. 2009, 86, 2228-2231.
21. Yang, K.-Y.; Yoon, K.-M.; Lim, S.; Lee, H. J. Vac. Sci. Technol., B 2009, 27, 2786-2789.
22. Radha, B.; Lim, S. H.; Saifullah, M. S. M.; Kulkarni, G. U. Sci. Rep. 2013, 3, 1078.
23. Raut, H. K.; Dinachali, S. S.; He, A. Y.; Ganesh, V. A.; Saifullah, M. S. M.; Law, J.; Ramakrishna, S. Energy Environ. Sci. 2013, 6, 1929-1937.
24. Ganesan, R.; Dumond, J.; Saifullah, M. S. M.; Lim, S. H.; Hussain, H.; Low, H. Y. ACS Nano 2012, 6, 1494-1502.
25. Long, B. K.; Keitz, B. K.; Willson, C. G. J. Mater. Chem. 2007, 17, 3575-3580.
26. Kim, E. K.; Stacey, N. A.; Smith, B. J.; Dickey, M. D.; Johnson, S. C.; Trinque, B. C.; Willson, C. G. J. Vac. Sci. Technol., B 2004, 22, 131-135.
27. Palmieri, F.; Adams, J.; Long, B.; Heath, W.; Tsiartas, P.; Willson, C. G. ACS Nano 2007, 1, 307-312.
28. Heath, W. H.; Palmieri, F.; Adams, J. R.; Long, B. K.; Chute, J.; Holcombe, T. W.; Zieren, S.; Truitt, M. J.; White, J. L.; Willson, C. G. Macromolecules 2008, 41, 719-726.
29. Takei, S. Jpn. J. Appl. Phys. 2010, 49, 071602.
30. Passinger, S.; Saifullah, M. S. M.; Reinhardt, C.; Subramanian, K. R. V.; Chichkov, B. N.; Welland, M. E. Adv. Mater. 2007, 19, 1218-1221.
31. Duoss, E. B.; Twardowski, M.; Lewis, J. A. Adv. Mater. 2007, 19, 3485-3489.
32. Voicu, N. E.; Saifullah, M. S. M.; Subramanian, K. R. V.; Welland, M. E.; Steiner, U. Soft Matter 2007, 3, 554-557.
33. Van Kan, J. A.; Bettiol, A. A.; Chiam, S. Y.; Saifullah, M. S. M.; Subramanian, K. R. V.; Welland, M. E.; Watt, F. Nucl. Instrum. Methods Phys. Res., Sect. B 2007, 260, 460-463.
34. Bradley, D. C.; Mehrotra, R. C.; Gaur, D. P. Metal Alkoxides; Academic Press: London, 1986.
35. Me?ndez-Vivar, J.; Bosch, P.; Lara, V. H.; Mendoza-Serna, R. J. Sol-Gel Sci. Technol. 2002, 25, 249-254.
36. Miele-Pajot, N.; Hubert-Pfalzgraf, L. G.; Papiernik, R.; Vaissermann, J.; Collier, R. J. Mater. Chem. 1999, 9, 3027-3033.
37. Patel, M. P.; Braden, M.; Davy, K. W. Biomaterials 1987, 8, 53-56.
38. Brinker, C. J.; Scherer, G. W. Sol-Gel Science-The Physics And Chemistry Of Sol-Gel Processing; Academic Press, Inc.: San Diego, CA, 1990.
39. Truffier-Boutry, D.; Zelsmann, M.; De Girolamo, J.; Boussey, J.; Lombard, C.; Pe?pin-Donat, B. Appl. Phys. Lett. 2009, 94, 044110.