Degradable cross-linkers and strippable imaging materials for step-and-flash imprint lithography

Macromolecules

Volumn 41, Issue 3, 2008, Pages 719-726

  Heath, William H ^a   Palmieri, Frank ^a   Adams, Jacob R ^a   Long, Brian K ^a   Chute, Jerred ^a   Holcombe, Thomas W ^a   Zieren, Shelley ^a   Truitt, Matthew J ^b   White, Jeffery L ^b   Willson, C Grant ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIACRYLATE; LINKAGES; METHACRYLATE; STEP-AND-FLASH IMPRINT LITHOGRAPHY (S-FTL);

CROSSLINKING; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHOTOLITHOGRAPHY; PHOTOPOLYMERIZATION; SIZE EXCLUSION CHROMATOGRAPHY; SYNTHESIS (CHEMICAL);

IMAGING SYSTEMS;

EID: 39749104292     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma702291k     Document Type: Article

References (16)

1. Resnick, D. J.; Sreenivasan, S. V.; Willson, C. G. Mater. Today 2005, 8, 34.
2. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Science 1996, 272, 85.
3. Mancini, D. P.; Resnick, D. J.; Sreenivasan, S. V.; Watts, M. P. C. J. Solid State Technol. 2004, 47, 55.
4. Stewart, M. D.; Johnson, S. C.; Sreenivasan, S. V.; Resnick, D. J.; Willson, C. G. J. Microlithogr., Microfabr., Microsyst. 2005, 4, 011002-1.
5. Stewart, M. D.; Wetzel, J. T.; Willson, C. G. Proc SPIE-Int. Soc. Opt. Eng. 2005, 5751, 210.
6. Colburn, M.; Suez, I.; More, A.; Willson, C. G. J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct. - Process., Meas., Phenom. 2001, 19, 2685.
7. De Clercq, R. R.; Goethals, E. J. Macromolecules 1992, 25, 1109.
8. Ruckenstein, E.; Zhang, H. Macromolecules 1999, 32, 3979.
9. Themistou, E.; Patrickios, C. S. Macromolecules 2006, 39, 73.
10. Chen, X.; Wudl, F.; Mal, A. K.; Shen, H.; Nutt, S. R. Macromolecules 2003, 36, 1802.
11. Chen, X.; Dam, M. A.; Ono, K.; Mal, A.; Shen, H.; Nutt S. R.; Sheran, K.; Wudl, F. Science 2002, 295, 1698.
12. Lorette, N. B.; Howard, W. L. J. Org. Chem. 1960, 25, 521.
13. Ogino, K.; Chen, J.-S.; Ober, C. K. Chem. Mater. 1998, 10, 3833.
14. Zhou, Z.-H.; Chen, R.-Y. Synth. Commun. 2000, 30, 3527.
15. Liu, Y.-L.; Hsieh, C.-Y. J. Polym. Sci., Part A: Polym. Chem. 2005, 44, 905.
16. Dickey, M. D.; Willson, C. G. AIChE J. 2006, 52.