Long-term bilayer encapsulation performance of atomic layer deposited Al2O3 and parylene c for biomedical implantable devices

IEEE Transactions on Biomedical Engineering

Volumn 60, Issue 10, 2013, Pages 2943-2951

  Xie, Xianzong ^a   Rieth, Loren ^a   Caldwell, Ryan ^a   Diwekar, Mohit ^a   Tathireddy, Prashant ^a   Sharma, Rohit ^a   Solzbacher, Florian ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

Accelerated lifetime testing; bias voltage; encapsulation of implantable devices; impedance spectroscopy; leakage current; Parylene C; topography

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; BIAS VOLTAGE; COATINGS; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; IMPLANTS (SURGICAL); LEAKAGE CURRENTS; SPECTROSCOPY; SURFACE MOUNT TECHNOLOGY; TOPOGRAPHY;

ACCELERATED LIFETIME TESTING; ATOMIC LAYER DEPOSITED; BIOMEDICAL IMPLANTABLE DEVICES; IMPEDANCE SPECTROSCOPY; IMPLANTABLE DEVICES; INTERDIGITATED ELECTRODES; PARYLENE C; SURFACE MOUNT DEVICE;

ELECTRONIC EQUIPMENT TESTING;

ALUMINUM OXIDE; BIOMEDICAL AND DENTAL MATERIALS; PARYLENE C; REACTIVE OXYGEN METABOLITE; UNCLASSIFIED DRUG;

AGING; ARTICLE; BILAYER MEMBRANE; BIOCOMPATIBILITY; DEGRADATION; DIELECTRIC CONSTANT; ELECTRIC POTENTIAL; ELECTROCHEMICAL ANALYSIS; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTRODE; ENCAPSULATION; IMPEDANCE; IMPLANT; MATERIAL COATING;

ALUMINUM OXIDE; BODY FLUIDS; COATED MATERIALS, BIOCOMPATIBLE; ELECTRIC IMPEDANCE; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; POLYMERS; PROSTHESES AND IMPLANTS; PROSTHESIS DESIGN; SURFACE PROPERTIES; XYLENES;

EID: 84884583213     PISSN: 00189294     EISSN: 15582531     Source Type: Journal    
DOI: 10.1109/TBME.2013.2266542     Document Type: Article

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