Encapsulation of an integrated neural interface device with parylene C

IEEE Transactions on Biomedical Engineering

Volumn 56, Issue 1, 2009, Pages 23-29

  Hsu, Jui Mei ^a   Rieth, Loren ^b   Normann, Richard A ^c   Tathireddy, Prashant ^b   Solzbacher, Florian ^b  

^a UNIVERSITY OF UTAH   (United States)

^b UNIVERSITY OF UTAH   (United States)

^c University of Utah   (United States)

Author keywords

Conformal encapsulation; Parylene etching; Stability of Parylene C

Indexed keywords

3-D ELECTRODES; ACTIVE ELECTRODES; CHEMICAL VAPOR DEPOSITED; CONFORMAL ENCAPSULATION; DIELECTRIC ENCAPSULATIONS; ELECTRICAL INSULATIONS; ELECTRODE IMPEDANCES; IMPEDANCE SPECTROSCOPIES; LEAKAGE CURRENT MEASUREMENTS; NERVOUS SYSTEMS; NEURAL DISORDERS; NEURAL INTERFACES; OXYGEN PLASMA ETCHINGS; PARYLENE ETCHING; PHYSIOLOGICAL ENVIRONMENTS; SALINE SOLUTIONS; THICKNESS VARIATIONS;

ELECTRIC CURRENT MEASUREMENT; INSULATION; OPTICAL MICROSCOPY; OXYGEN; PLASMA ETCHING; PLASMAS; REACTIVE ION ETCHING; SYSTEM STABILITY;

ANISOTROPIC ETCHING;

COATED MATERIALS, BIOCOMPATIBLE; ELECTRIC IMPEDANCE; ELECTRODES, IMPLANTED; MATERIALS TESTING; MICROELECTRODES; NEURONS; OXYGEN; POLYMERS; SILICON; XYLENES;

EID: 60549100010     PISSN: 00189294     EISSN: None     Source Type: Journal    
DOI: 10.1109/TBME.2008.2002155     Document Type: Article

References (25)

1. E. M. Maynard, C. T. Nordhausen, and R. A. Normann, "The Utah intracortical electrode array:Arecording structure for potential brain-computer interfaces," Electroencephalogr. Clin. Neurophysiol., vol. 102, pp. 228-239, 1997.
2. A. Abbott, "Neuroprosthetics: In search of the sixth sense," Nature, vol. 442, pp. 125-127, 2006.
3. J. P. Donoghue, "Connecting cortex tomachines: Recent advances in brain interfaces," Nat. Neurosci., vol. 5, pp. 1085-1088, 2002.
4. M. Töpper, M. Klein, K. Buschick, V. Glaw, K. Orth, O. Ehrmann, M. Hutter, H. Oppermann, K.-F. Becker, T. Braun, S. Kim, P. Tathireddy, S. Chakravarty, and F. Solzbacher, "Biocompatible hybrid flip chip microsystem integration for next generation wireless neural interfaces," in Proc. 55th Electron. Component Technol. Conf. (ECTC), San Diego, CA, May 30-Jun. 2, 2006, pp. 705-708.
5. K. J. James, "An analysis of insulating material used to encapsulate silicon-based microelectrode arrays" Ph.D. dissertation, Univ. Utah, Salt Lake City, 1995.
6. S. F. Cogan, D. J. Edell, A. A. Guzelian, Y. P. Liu, and R. Edell, "Plasma-enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating," J. Biomed. Mater. Res. A, vol. 67, pp. 856-867, 2003.
7. X. Xiao, J. Wang, C. Liu, J. A. Carlisle, B. Mech, R. Greenberg, D. Guven, R. Freda, M. S. Humayun, J. Weiland, and O. Auciello, "In vitro and in vivo evaluation of ultrananocrystalline diamond for coating of implantable retinal microchips," J. Biomed. Mater. Res. B, Appl. Biomater., vol. 77, pp. 273-281, 2006.
8. J. B. Fortin and T.-M. Lu, Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films. Norwell, MA: Kluwer, 2004.
9. U. Westedt, M. Wittmar, M. Hellwig, P. Hanefeld, A. Greiner, A. K. Schaper, and T. Kissel, "Paclitaxel releasing films consisting of poly(vinyl alcohol)-graft-poly(lactide-co-glycolide) and their potential as biodegradable stent coatings," J. Control Release, vol. 111, pp. 235-246, 2006.
10. S. Takeuchi, D. Ziegler, Y. Yoshida, K. Mabuchi, and T. Suzuki, "Parylene flexible neural probes integrated with microfluidic channels," Lab Chip, vol. 5, pp. 519-523, 2005.
11. P. A. Stupar and A. P. Pisano, "Silicon, parylene, and silicon/parylene micro-needles for strength and toughness," in Proc. 11th Int. Conf. Solid-State Sens. Actuators, Munich, Germany, 2001, pp. 1386-1389.
12. A. B. Fontaine, K. Koelling, S. D. Passos, J. Cearlock, R. Hoffman, and D. G. Spigos, "Polymeric surface modifications of tantalum stents," J. Endovasc. Surg., vol. 3, pp. 276-283, 1996.
13. N. Iguchi, H. Kasanuki, N. Matsuda, M. Shoda, S. Ohnishi, and S. Hosoda, "Contact sensitivity to polychloroparaxylene-coated cardiac pacemaker," Pacing Clin. Electrophysiol., vol. 20, pp. 372-373, 1997.
14. E. M. Schmidt, J. S. McIntosh, and M. J. Bak, "Long-term implants of Parylene-C coated microelectrodes," Med. Biol. Eng. Comput., vol. 26, pp. 96-101, 1988.
15. M. C. Demirel, E. So, T. M. Ritty, S. H. Naidu, and A. Lakhtakia, "Fibroblast cell attachment and growth on nanoengineered sculptured thin films," J. Biomed. Mater. Res. B, Appl. Biomater., vol. 81B, pp. 219-223, 2007.
16. T. Goda, T. Konno, M. Takai, and K. Ishihara, "Photoinduced phospholipid polymer grafting on Parylene film: Advanced lubrication and antibiofouling properties," Colloids Surf. B Biointerfaces, vol. 54, pp. 67-73, 2007.
17. J. T. C. Yeh and K. R. Grebe, "Patterning of poly-para-xylenes by reactive ion etching," J. Vac. Sci. Technol., vol. 2, pp. 604-608, 1983.
18. E. M. Schmidt, M. J. Bak, and P. Christensen, "Laser exposure of Parylene-C insulated microelectrodes," J. Neurosci. Methods, vol. 62, pp. 89-92, 1995.
19. Y. Terasawa, H. Tashiro, A. Uehara, T. Saitoh, M. Ozawa, T. Tokuda, and J. Ohta, "The development of a multichannel electrode array for retinal prostheses," J. Artif. Organs, vol. 9, pp. 263-266, 2006.
20. J. D. Weiland, D. J. Anderson, C. C. Pogatchnik, and J. J. Boogaard, "Recessed electrodes formed by laser ablation of Parylene coated, micromachined silicon probes," in Proc. 19th Int. Conf. IEEE/EMBS, Chicago, IL, Oct. 30-Nov. 2, 1997, vol. 5, pp. 2273-2276.
21. J. Ji, F. Tay, J. Miao, and C. Iliescu, "Microfabricated microneedle with porous tip for drug delivery," J. Micromech. Microeng., vol. 16, pp. 958-964, 2006.
22. P. Man, C. Mastrangelo, M. A. Burns, and D. Burke, "Microfabricated plastic capillary system with photo-definable hydrophilic and hydrophobic regions," in Proc. Transducers Conf., Sendai, Japan, 1999, pp. 738-741.
23. x:H film as encapsulation material for integrated silicon based neural interface devices," Thin Solid Films, vol. 516, pp. 34-41, 2007.
24. K. E. Jones, P. K. Campbell, and R. A. Normann, "A glass/silicon composite intracortical electrode array," Ann. Biomed. Eng., vol. 20, pp. 423-437, 1992.
25. M. Kendig and J. Scully, "Basic aspects of electrochemical impedance application for the life prediction of organic coatings on metals," Corrosion, vol. 46, pp. 22-29, 1990.