메뉴 건너뛰기




Volumn 30, Issue 31, 2009, Pages 6158-6167

The insulation performance of reactive parylene films in implantable electronic devices

Author keywords

Adhesion; Electrochemistry; Electronic material; Micromachining; Neural prosthesis; Parylene

Indexed keywords

ADHESION MEASUREMENT; ADHESION TEST; APPROPRIATE MATERIALS; ELECTRICAL TESTING; ELECTRONIC DEVICE; ELECTRONIC MATERIAL; FUNCTIONALIZED; HIGH FREQUENCY PERFORMANCE; HIGH IMPEDANCE; INSULATION PERFORMANCE; INTER-DIGITATED ELECTRODES; LOW DIELECTRIC CONSTANTS; METAL ADHESION; METAL LAYER; MICROFABRICATED DEVICES; NEURAL PROSTHESIS; PARYLENE; PARYLENE C; PARYLENE FILM; PARYLENES; REACTIVE GROUP; WET ADHESION;

EID: 69649086628     PISSN: 01429612     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.biomaterials.2009.07.061     Document Type: Article
Times cited : (117)

References (35)
  • 1
    • 69649094603 scopus 로고    scopus 로고
    • Bauer I., Russek U.A., Herfurth H.J., Witte R., Heinemann S., Newaz G., et al. (Eds), SPIE, San Jose, CA, USA
    • In: Bauer I., Russek U.A., Herfurth H.J., Witte R., Heinemann S., Newaz G., et al. (Eds). Laser microjoining of dissimilar and biocompatible materials. Photon processing in microelectronics and photonics vol. III (2004), SPIE, San Jose, CA, USA
    • (2004) Photon processing in microelectronics and photonics , vol.III
  • 2
    • 0036240178 scopus 로고    scopus 로고
    • Evaluation of MEMS materials of construction for implantable medical devices
    • Kotzar G., Freas M., Abel P., Fleischman A., Roy S., Zorman C., et al. Evaluation of MEMS materials of construction for implantable medical devices. Biomaterials 23 13 (2002) 2737-2750
    • (2002) Biomaterials , vol.23 , Issue.13 , pp. 2737-2750
    • Kotzar, G.1    Freas, M.2    Abel, P.3    Fleischman, A.4    Roy, S.5    Zorman, C.6
  • 3
    • 34249846306 scopus 로고    scopus 로고
    • Neural probe design for reduced tissue encapsulation in CNS
    • Seymour J.P., and Kipke D.R. Neural probe design for reduced tissue encapsulation in CNS. Biomaterials 28 25 (2007) 3594-3607
    • (2007) Biomaterials , vol.28 , Issue.25 , pp. 3594-3607
    • Seymour, J.P.1    Kipke, D.R.2
  • 4
    • 0026185702 scopus 로고
    • Investigation of plasma-polymerized films as primers for parylene-c coatings on neural prosthesis materials
    • Yamagishi F.G. Investigation of plasma-polymerized films as primers for parylene-c coatings on neural prosthesis materials. Thin Solid Films 202 1 (1991) 39-50
    • (1991) Thin Solid Films , vol.202 , Issue.1 , pp. 39-50
    • Yamagishi, F.G.1
  • 6
    • 34249694931 scopus 로고    scopus 로고
    • Recent advances in phosphorescent OLEDs for small- and large-area-display sizes
    • Weaver M.S., Kwong R.C., Adamovich V.A., Hack M., and Brown J.J. Recent advances in phosphorescent OLEDs for small- and large-area-display sizes. J Soc Inf Display 14 5 (2006) 449-452
    • (2006) J Soc Inf Display , vol.14 , Issue.5 , pp. 449-452
    • Weaver, M.S.1    Kwong, R.C.2    Adamovich, V.A.3    Hack, M.4    Brown, J.J.5
  • 7
    • 0020207760 scopus 로고
    • Effect of glow discharge treatment of substrates on parylene-substrate adhesion
    • Sharma A.K., and Yasuda H. Effect of glow discharge treatment of substrates on parylene-substrate adhesion. J Vacuum Sci Tech 21 4 (1982) 994-998
    • (1982) J Vacuum Sci Tech , vol.21 , Issue.4 , pp. 994-998
    • Sharma, A.K.1    Yasuda, H.2
  • 8
    • 0000977941 scopus 로고    scopus 로고
    • Interface-engineered parylene C coating for corrosion protection of cold-rolled steel
    • Yasuda H., Chun B.H., Cho D.L., Lin T.J., Yang D.J., and Antonelli J.A. Interface-engineered parylene C coating for corrosion protection of cold-rolled steel. Corrosion 52 3 (1996) 169-176
    • (1996) Corrosion , vol.52 , Issue.3 , pp. 169-176
    • Yasuda, H.1    Chun, B.H.2    Cho, D.L.3    Lin, T.J.4    Yang, D.J.5    Antonelli, J.A.6
  • 9
    • 0019824557 scopus 로고
    • The adhesion of glow-discharge polymers, silastic and parylene to implantable platinum electrodes: results of tensile pull tests after exposure to isotonic sodium chloride
    • Sadhir R.K., James W.J., Yasuda H.K., Sharma A.K., Nichols M.F., and Hahn A.W. The adhesion of glow-discharge polymers, silastic and parylene to implantable platinum electrodes: results of tensile pull tests after exposure to isotonic sodium chloride. Biomaterials 2 4 (1981) 239-243
    • (1981) Biomaterials , vol.2 , Issue.4 , pp. 239-243
    • Sadhir, R.K.1    James, W.J.2    Yasuda, H.K.3    Sharma, A.K.4    Nichols, M.F.5    Hahn, A.W.6
  • 10
    • 0035331273 scopus 로고    scopus 로고
    • Engineering the surface and interface of parylene C coatings by low-temperature plasmas
    • Yu Q., Deffeyes J., and Yasuda H. Engineering the surface and interface of parylene C coatings by low-temperature plasmas. Prog Org Coat 41 4 (2001) 247-253
    • (2001) Prog Org Coat , vol.41 , Issue.4 , pp. 247-253
    • Yu, Q.1    Deffeyes, J.2    Yasuda, H.3
  • 11
    • 0035331401 scopus 로고    scopus 로고
    • Interfacial factors in corrosion protection: an EIS study of model systems
    • Yasuda H., Yu Q.S., and Chen M. Interfacial factors in corrosion protection: an EIS study of model systems. Prog Org Coat 41 4 (2001) 273-279
    • (2001) Prog Org Coat , vol.41 , Issue.4 , pp. 273-279
    • Yasuda, H.1    Yu, Q.S.2    Chen, M.3
  • 12
    • 0023864665 scopus 로고
    • Long-term implants of parylene-C coated microelectrodes
    • Schmidt E.M., McIntosh J.S., and Bak M.J. Long-term implants of parylene-C coated microelectrodes. Med Biol Eng Comput 26 1 (1988) 96-101
    • (1988) Med Biol Eng Comput , vol.26 , Issue.1 , pp. 96-101
    • Schmidt, E.M.1    McIntosh, J.S.2    Bak, M.J.3
  • 13
    • 29544436692 scopus 로고    scopus 로고
    • Reliability of signals from a chronically implanted, silicon-based electrode array in non-human primate primary motor cortex
    • Suner S., Fellows M.R., Vargas-Irwin C., Nakata G.K., and Donoghue J.P. Reliability of signals from a chronically implanted, silicon-based electrode array in non-human primate primary motor cortex. IEEE Trans Neural Syst Rehabil Eng 13 4 (2005) 524-541
    • (2005) IEEE Trans Neural Syst Rehabil Eng , vol.13 , Issue.4 , pp. 524-541
    • Suner, S.1    Fellows, M.R.2    Vargas-Irwin, C.3    Nakata, G.K.4    Donoghue, J.P.5
  • 14
    • 0034998258 scopus 로고    scopus 로고
    • Surface micromachined leakage proof Parylene check valve
    • IEEE; Piscataway, NJ, USA: IEEE
    • Xie J, Yang X, Wang XQ, Tai YC. Surface micromachined leakage proof Parylene check valve. Proc MEMS 2001 IEEE; Piscataway, NJ, USA: IEEE.
    • (2001) Proc MEMS
    • Xie, J.1    Yang, X.2    Wang, X.Q.3    Tai, Y.C.4
  • 16
    • 33846934978 scopus 로고    scopus 로고
    • Integrated flexible ocular coil for power and data transfer in retinal prostheses
    • Li W., Rodger D., Weiland J., Humayun M., and Tai Y. Integrated flexible ocular coil for power and data transfer in retinal prostheses. Conf Proc IEEE Eng Med Biol Soc 1 1 (2005) 1028-1031
    • (2005) Conf Proc IEEE Eng Med Biol Soc , vol.1 , Issue.1 , pp. 1028-1031
    • Li, W.1    Rodger, D.2    Weiland, J.3    Humayun, M.4    Tai, Y.5
  • 17
    • 27744506902 scopus 로고    scopus 로고
    • Microelectronic packaging for retinal prostheses
    • Rodger D.C., and Tai Y.C. Microelectronic packaging for retinal prostheses. IEEE Eng Med Biol Mag 24 5 (2005) 52-57
    • (2005) IEEE Eng Med Biol Mag , vol.24 , Issue.5 , pp. 52-57
    • Rodger, D.C.1    Tai, Y.C.2
  • 18
    • 29244473558 scopus 로고    scopus 로고
    • Characterization of low-temperature wafer bonding using thin-film parylene
    • Kim H., and Najafi K. Characterization of low-temperature wafer bonding using thin-film parylene. J Microelectromech Syst 14 6 (2005) 1347-1355
    • (2005) J Microelectromech Syst , vol.14 , Issue.6 , pp. 1347-1355
    • Kim, H.1    Najafi, K.2
  • 19
    • 33845531496 scopus 로고    scopus 로고
    • Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of parylene
    • Ziegler D., Suzuki T., and Takeuchi S. Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of parylene. J Microelectromech Syst 15 6 (2006) 1477-1482
    • (2006) J Microelectromech Syst , vol.15 , Issue.6 , pp. 1477-1482
    • Ziegler, D.1    Suzuki, T.2    Takeuchi, S.3
  • 20
    • 33748324525 scopus 로고    scopus 로고
    • Reactive polymer coatings for biomimetic surface engineering
    • Lahann J. Reactive polymer coatings for biomimetic surface engineering. Chem Eng Commun 193 11 (2006) 1457-1468
    • (2006) Chem Eng Commun , vol.193 , Issue.11 , pp. 1457-1468
    • Lahann, J.1
  • 21
    • 0037695230 scopus 로고    scopus 로고
    • Reactive polymer coatings: a first step toward surface engineering of microfluidic devices
    • Lahann J., Balcells M., Lu H., Rodon T., Jensen K.F., and Langer R. Reactive polymer coatings: a first step toward surface engineering of microfluidic devices. Anal Chem 75 9 (2003) 2117-2122
    • (2003) Anal Chem , vol.75 , Issue.9 , pp. 2117-2122
    • Lahann, J.1    Balcells, M.2    Lu, H.3    Rodon, T.4    Jensen, K.F.5    Langer, R.6
  • 22
    • 0032336515 scopus 로고    scopus 로고
    • Chemical vapour deposition polymerization of substituted [2.2]paracyclophanes
    • Lahann J., Klee D., and Höcker H. Chemical vapour deposition polymerization of substituted [2.2]paracyclophanes. Macromol Rapid Commun 19 9 (1998) 441-445
    • (1998) Macromol Rapid Commun , vol.19 , Issue.9 , pp. 441-445
    • Lahann, J.1    Klee, D.2    Höcker, H.3
  • 23
    • 44949162205 scopus 로고    scopus 로고
    • Solventless adhesive bonding using reactive polymer coatings
    • Chen H.-Y., McClelland A.A., Chen Z., and Lahann J. Solventless adhesive bonding using reactive polymer coatings. Anal Chem 80 11 (2008) 4119-4124
    • (2008) Anal Chem , vol.80 , Issue.11 , pp. 4119-4124
    • Chen, H.-Y.1    McClelland, A.A.2    Chen, Z.3    Lahann, J.4
  • 24
    • 48449094933 scopus 로고    scopus 로고
    • Different approaches in evaluating organic paint coatings with electrochemical impedance spectroscopy
    • Akbarinezhad E. Different approaches in evaluating organic paint coatings with electrochemical impedance spectroscopy. Surf Eng 24 4 (2008) 280-286
    • (2008) Surf Eng , vol.24 , Issue.4 , pp. 280-286
    • Akbarinezhad, E.1
  • 26
    • 0028424337 scopus 로고
    • Determination of coating performance using electrochemical impedance spectroscopy
    • van Westing E.P.M., Ferrari G.M., and De Wit J.H.W. Determination of coating performance using electrochemical impedance spectroscopy. Electrochim Acta 39 7 (1994) 899-910
    • (1994) Electrochim Acta , vol.39 , Issue.7 , pp. 899-910
    • van Westing, E.P.M.1    Ferrari, G.M.2    De Wit, J.H.W.3
  • 27
    • 27944498962 scopus 로고    scopus 로고
    • Vapor-based synthesis of poly[(4-formyl-p-xylylene)-co-(p-xylylene)] and its use for biomimetic surface modifications
    • Nandivada H., Chen H.-Y., and Lahann J. Vapor-based synthesis of poly[(4-formyl-p-xylylene)-co-(p-xylylene)] and its use for biomimetic surface modifications. Macromol Rapid Commun 26 22 (2005) 1794-1799
    • (2005) Macromol Rapid Commun , vol.26 , Issue.22 , pp. 1794-1799
    • Nandivada, H.1    Chen, H.-Y.2    Lahann, J.3
  • 28
    • 34548290850 scopus 로고    scopus 로고
    • Vapor-based polymerization of functionalized [2.2]paracyclophanes: a unique approach towards surface-engineered microenvironments
    • Wiley-VCH, Weinheim p. 463
    • Klee D., Weiss N., and Lahann J. Vapor-based polymerization of functionalized [2.2]paracyclophanes: a unique approach towards surface-engineered microenvironments. Modern cyclophane chemistry (2004), Wiley-VCH, Weinheim p. 463
    • (2004) Modern cyclophane chemistry
    • Klee, D.1    Weiss, N.2    Lahann, J.3
  • 29
    • 0035422827 scopus 로고    scopus 로고
    • High density interconnects and flexible hybrid assemblies for active biomedical implants
    • Meyer J.U., Stieglitz T., Scholz O., Haberer W., and Beutel H. High density interconnects and flexible hybrid assemblies for active biomedical implants. IEEE Trans Adv Packag 24 3 (2001) 366-374
    • (2001) IEEE Trans Adv Packag , vol.24 , Issue.3 , pp. 366-374
    • Meyer, J.U.1    Stieglitz, T.2    Scholz, O.3    Haberer, W.4    Beutel, H.5
  • 30
    • 0022659417 scopus 로고
    • Nonlinear least squares fit procedure for analysis of immitance data of electrochemical systems
    • Boukamp B.A. Nonlinear least squares fit procedure for analysis of immitance data of electrochemical systems. Solid State Ionics 20 1 (1986) 31-44
    • (1986) Solid State Ionics , vol.20 , Issue.1 , pp. 31-44
    • Boukamp, B.A.1
  • 31
    • 0001674408 scopus 로고    scopus 로고
    • Corrosion protection by organic coatings: electrochemical mechanism and novel methods of investigation
    • Grundmeier G., Schmidt W., and Stratmann M. Corrosion protection by organic coatings: electrochemical mechanism and novel methods of investigation. Electrochim Acta 45 15-16 (2000) 2515-2533
    • (2000) Electrochim Acta , vol.45 , Issue.15-16 , pp. 2515-2533
    • Grundmeier, G.1    Schmidt, W.2    Stratmann, M.3
  • 32
    • 0010937850 scopus 로고
    • Formation of metal-oxygen-polymer complexes on polystyrene with nickel and chromium
    • Burkstrand J.M. Formation of metal-oxygen-polymer complexes on polystyrene with nickel and chromium. J Vacuum Sci Tech 16 4 (1979) 1072-1074
    • (1979) J Vacuum Sci Tech , vol.16 , Issue.4 , pp. 1072-1074
    • Burkstrand, J.M.1
  • 33
    • 0019584467 scopus 로고
    • Metal-polymer interfaces: adhesion and X-ray photoemission studies
    • Burkstrand J.M. Metal-polymer interfaces: adhesion and X-ray photoemission studies. J Appl Phys 52 7 (1981) 4795-4800
    • (1981) J Appl Phys , vol.52 , Issue.7 , pp. 4795-4800
    • Burkstrand, J.M.1
  • 34
    • 34247143720 scopus 로고    scopus 로고
    • Interfacial adhesion of polymeric adhesive film on different surfaces in the fabrication of polymer photonic devices
    • Uddin M.A., Ho W.F., and Hau Ping C. Interfacial adhesion of polymeric adhesive film on different surfaces in the fabrication of polymer photonic devices. J Mater Sci Mater Electron 18 6 (2007) 655-663
    • (2007) J Mater Sci Mater Electron , vol.18 , Issue.6 , pp. 655-663
    • Uddin, M.A.1    Ho, W.F.2    Hau Ping, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.