In vivo biostability of CVD silicon oxide and silicon nitride films

Materials Research Society Symposium Proceedings

Volumn 872, Issue , 2005, Pages 279-284

  Maloney, John M ^a   Lipka, Sara A ^a   Baldwin, Samuel P ^a  

^a MicroCHIPS Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; ION BEAMS; MICROPROCESSOR CHIPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; SILICA; SILICON NITRIDE; SPECTROPHOTOMETRY;

BIOSTABILITY; SILICON CHIPS;

THIN FILMS;

EID: 30644469549     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-872-j14.3     Document Type: Conference Paper

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