Analytical evaluation of the interdigital electrodes capacitance for a multi-layered structure

Sensors and Actuators, A: Physical

Volumn 112, Issue 2-3, 2004, Pages 291-301

  Igreja, Rui ^a   Dias, C J ^a  

^a DEPARTAMENTO DE CIÊNCIA DOS MATERIAIS   (Portugal)

Author keywords

Capacitive sensors; Conformal mapping; Interdigital electrodes

Indexed keywords

BIOSENSORS; CAPACITANCE; COMPUTATIONAL METHODS; CONFORMAL MAPPING; DEPOSITION; ELECTRIC POTENTIAL; ELECTROOPTICAL DEVICES; ERROR ANALYSIS; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; LAPLACE TRANSFORMS; METALLIZING; MULTILAYERS; PERMITTIVITY; POLARIZATION; POLYMERS;

CAPACITIVE SENSORS; INTERDIGITAL CAPACITORS (IDC); INTERDIGITAL ELECTRODES; MICROSTRIP LINE THEORY; ORGANIC VAPOR SENSING;

ELECTRODES;

EID: 2342459730     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.040     Document Type: Article

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