Influence of substrate bias on microstructural variation and electro-optical properties of sputter-deposited ZnO: Al films

Science of Advanced Materials

Volumn 5, Issue 7, 2013, Pages 844-853

  Liang, Chih Hao ^a   Hwang, Weng Sing ^a   Wang, Wei Lin ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Al Doped ZnO films; Electro Optical Properties; Sputtering deposition; Stacking fault

Indexed keywords

EID: 84880984410     PISSN: 19472935     EISSN: 19472943     Source Type: Journal    
DOI: 10.1166/sam.2013.1508     Document Type: Article

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