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Volumn 179, Issue , 2013, Pages 114-124

Flexible sensing systems based on polysilicon thin film transistors technology

Author keywords

Flexible electronics; Polysilicon thin film transistors; Sensing systems

Indexed keywords

FABRICATION; FLEXIBLE ELECTRONICS; FOOD SUPPLY; POLYCRYSTALLINE MATERIALS; POLYSILICON; SIGNAL CONDITIONING CIRCUITS; SIGNAL TO NOISE RATIO; SUBSTRATES; TEMPERATURE; THIN FILM TRANSISTORS; THIN FILMS;

EID: 84880917560     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.10.093     Document Type: Article
Times cited : (68)

References (54)
  • 6
    • 84863137613 scopus 로고    scopus 로고
    • A passive radiofrequency pH-sensing tag for wireless food-quality monitoring
    • W.-D. Huang, S. Deb, Y.-S. Seo, S. Rao, M. Chiao, J.C. Chiao, A passive radiofrequency pH-sensing tag for wireless food-quality monitoring, IEEE Sensors Journal 12 (March (3)) (2012).
    • (2012) IEEE Sensors Journal , vol.12 , Issue.3 MARCH
    • Huang, W.-D.1    Deb, S.2    Seo, Y.-S.3    Rao, S.4    Chiao, M.5    Chiao, J.C.6
  • 9
    • 33645143845 scopus 로고    scopus 로고
    • Organic and polymer transistors for electronics
    • A. Dodabalapur, Organic and polymer transistors for electronics, Materials Today 9 (April (4)) (2006) 24-30.
    • (2006) Materials Today , vol.9 , Issue.4 APRIL , pp. 24-30
    • Dodabalapur, A.1
  • 11
    • 38949207950 scopus 로고    scopus 로고
    • Low-temperature polysilicon thin film transistors on polyimide substrates for electronics on plastic
    • DOI 10.1016/j.sse.2007.10.041, PII S0038110107003589
    • A. Pecora, L. Maiolo, M. Cuscunà, D. Simeone, A. Minotti, L. Mariucci, G. Fortunato, Low-temperature polysilicon thin film transistors on polyimide substrates for electronics on plastic, Solid State Electronics 52 (2008) 348-352. (Pubitemid 351226136)
    • (2008) Solid-State Electronics , vol.52 , Issue.3 , pp. 348-352
    • Pecora, A.1    Maiolo, L.2    Cuscuna, M.3    Simeone, D.4    Minotti, A.5    Mariucci, L.6    Fortunato, G.7
  • 15
    • 79953149537 scopus 로고    scopus 로고
    • 2.8-inch WQVGA flexible AMOLED using high performance low temperature polysilicon TFT on plastic substrates
    • S. An, J. Lee, Y. Kim, T. Kim, D. Jin, H. Min, H. Chung, S. Kim, 2.8-inch WQVGA flexible AMOLED using high performance low temperature polysilicon TFT on plastic substrates, SID Symposium Digest 41 (2010) 706.
    • (2010) SID Symposium Digest , vol.41 , pp. 706
    • An, S.1    Lee, J.2    Kim, Y.3    Kim, T.4    Jin, D.5    Min, H.6    Chung, H.7    Kim, S.8
  • 17
    • 0036683875 scopus 로고    scopus 로고
    • Surface-free technology by laser annealing (SUFTLA) and its application to poly-Si TFT-LCDs on plastic film with integrated drivers
    • S. Inoue, S. Utsunomiya, T. Saeki, T. Shimoda, Surface-free technology by laser annealing (SUFTLA) and its application to poly-Si TFT-LCDs on plastic film with integrated drivers, IEEE Transactions on Electron Devices 49 (2002) 1353-1360.
    • (2002) IEEE Transactions on Electron Devices , vol.49 , pp. 1353-1360
    • Inoue, S.1    Utsunomiya, S.2    Saeki, T.3    Shimoda, T.4
  • 22
    • 44149110620 scopus 로고    scopus 로고
    • Polymers for flexible displays: From material selection to device applications
    • M.-C. Choi, Y. Kim, C.-S. Ha, Polymers for flexible displays: from material selection to device applications, Progress in Polymer Science 33 (2008) 581-630.
    • (2008) Progress in Polymer Science , vol.33 , pp. 581-630
    • Choi, M.-C.1    Kim, Y.2    Ha, C.-S.3
  • 25
    • 0033734517 scopus 로고    scopus 로고
    • High mobility thin film transistors fabricated on a plastic substrate at a processing temperature of 110?C
    • D.P. Gosain, T. Noguchi, S. Usui, High mobility thin film transistors fabricated on a plastic substrate at a processing temperature of 110 ?C, Japanese Journal of Applied Physics 39 (2000) L179-L181.
    • (2000) Japanese Journal of Applied Physics , vol.39
    • Gosain, D.P.1    Noguchi, T.2    Usui, S.3
  • 27
    • 33745636371 scopus 로고    scopus 로고
    • Oxide-silicon-oxide buffer structure for ultralow temperature polycrystalline silicon thin-film transistor on plastic substrate
    • DOI 10.1109/LED.2006.877713
    • Y.H. Kim, C.H. Chung, J. Moon, G.H. Kim, D.-J. Park, D.-W. Kim, J.W. Lim, S.J. Yun, Y.H. Song, J.H. Lee, Oxide-silicon-oxide buffer structure for ultralow temperature polycrystalline silicon thin-film transistor on plastic substrate, IEEE Electron Device Letters 27 (2006) 579-581. (Pubitemid 43965295)
    • (2006) IEEE Electron Device Letters , vol.27 , Issue.7 , pp. 579-581
    • Kim, Y.-H.1    Chung, C.-H.2    Moon, J.3    Kim, G.H.4    Park, D.-J.5    Kim, D.-W.6    Lim, J.W.7    Yun, S.J.8    Song, Y.-H.9    Lee, J.H.10
  • 32
    • 84863336070 scopus 로고    scopus 로고
    • 47.2:2.8-Inch WQVGA flexible AMOLED using high performance low temperature polysilicon TFT on plastic substrates
    • S. An, J. Lee, Y. Kim, T. Kim, D. Jin, H. Min, H. Chung, S.S. Kim, 47.2:2.8-Inch WQVGA flexible AMOLED using high performance low temperature polysilicon TFT on plastic substrates, SID Symposium Digest (2010) 706-709.
    • SID Symposium Digest (2010) , pp. 706-709
    • An, S.1    Lee, J.2    Kim, Y.3    Kim, T.4    Jin, D.5    Min, H.6    Chung, H.7    Kim, S.S.8
  • 33
    • 32244441950 scopus 로고    scopus 로고
    • Thin plastic electrophoretic displays fabricated by a novel process
    • I. French, D. McCulloch, I. Boerefijn, N. Kooyman, Thin plastic electrophoretic displays fabricated by a novel process, SID Symposium Digest 36 (2005) 1634-1637.
    • (2005) SID Symposium Digest , vol.36 , pp. 1634-1637
    • French, I.1    McCulloch, D.2    Boerefijn, I.3    Kooyman, N.4
  • 34
    • 33644542136 scopus 로고    scopus 로고
    • Low-temperature ECR-PECVD silicon dioxide as gate insulator for polycrystalline silicon thin film transistors
    • L. Maiolo, A. Pecora, G. Fortunato, N.D. Young, Low-temperature ECR-PECVD silicon dioxide as gate insulator for polycrystalline silicon thin film transistors, Journal of Vacuum Science & Technology A 24 (2006) 280.
    • (2006) Journal of Vacuum Science & Technology a , vol.24 , pp. 280
    • Maiolo, L.1    Pecora, A.2    Fortunato, G.3    Young, N.D.4
  • 35
    • 32844472649 scopus 로고    scopus 로고
    • Dual frequency PECVD silicon nitride for fabrication of CMUTs' membranes
    • DOI 10.1016/j.sna.2005.11.053, PII S0924424705007107
    • E. Cianci, A. Schina, A. Minotti, S. Quaresima, V. Foglietti, Dual frequency PECVD silicon nitride for fabrication of CMUTs' membranes, Sensors and Actuators A: Physical 127 (2006) 80-87. (Pubitemid 43253668)
    • (2006) Sensors and Actuators, A: Physical , vol.127 , Issue.1 , pp. 80-87
    • Cianci, E.1    Schina, A.2    Minotti, A.3    Quaresima, S.4    Foglietti, V.5
  • 36
    • 0001076246 scopus 로고    scopus 로고
    • Influence of excitation frequency, temperature, and hydrogen dilution on the stability of plasma enhanced chemical vapor deposited a-Si:H
    • R. Platz, S. Wagner, C. Hof, A. Shah, S. Wieder, B. Rech, Influence of excitation frequency, temperature and hydrogen dilution on the stability of plasma enhanced chemical vapor deposited a-Si:H, Journal of Applied Physics 84 (1998) 3949-3953. (Pubitemid 128600539)
    • (1998) Journal of Applied Physics , vol.84 , Issue.7 , pp. 3949-3953
    • Platz, R.1    Wagner, S.2    Hof, C.3    Shah, A.4    Wieder, S.5    Rech, B.6
  • 38
    • 0028369836 scopus 로고
    • Laser dehydrogenation/crystallization of plasma-enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors
    • P. Mei, J.B. Boyce, M. Hack, R.A. Lujan, R.I. Johnson, G.B. Anderson, D.K. Fork, S.E. Ready, Laser dehydrogenation/crystallization of plasma-enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors, Applied Physics Letters 64 (1994) 1132-1134.
    • (1994) Applied Physics Letters , vol.64 , pp. 1132-1134
    • Mei, P.1    Boyce, J.B.2    Hack, M.3    Lujan, R.A.4    Johnson, R.I.5    Anderson, G.B.6    Fork, D.K.7    Ready, S.E.8
  • 39
    • 0000887742 scopus 로고    scopus 로고
    • Step-by-step excimer laser induced crystallization of a-Si:H
    • P. Lengsfeld, N.H. Nickel, W. Fuhs, Step-by-step excimer laser induced crystallization of a-Si:H, Applied Physics Letters 76 (2000) 1680-1682.
    • (2000) Applied Physics Letters , vol.76 , pp. 1680-1682
    • Lengsfeld, P.1    Nickel, N.H.2    Fuhs, W.3
  • 40
    • 23144453076 scopus 로고    scopus 로고
    • Poly-Si TFT fabricated at 150°C using ICP-CVD and excimer laser annealing
    • DOI 10.1109/JPROC.2005.851535, Flexible Electronics Technology Part 1: Systems and Applications
    • S.-M. Han, M.-C. Lee, M.-Y. Shin, J.-H. Park, M.-K. Han, Poly-Si TFT fabricated at 150°C using ICP-CVD and excimer laser annealing, Proceeding of the IEEE 93 (2005) 1297-1305. (Pubitemid 41084574)
    • (2005) Proceedings of the IEEE , vol.93 , Issue.7 , pp. 1297-1305
    • Han, S.-M.1    Lee, M.-C.2    Shin, M.-Y.3    Park, J.-H.4    Han, M.-K.5
  • 43
    • 0345525032 scopus 로고
    • Low-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapour deposition
    • J. Batey, E. Tierney, Low-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapour deposition, Journal of Applied Physics 60 (1986) 3136-3145.
    • (1986) Journal of Applied Physics , vol.60 , pp. 3136-3145
    • Batey, J.1    Tierney, E.2
  • 46
    • 33744517744 scopus 로고    scopus 로고
    • A comparative analysis of silicon dioxide films deposited by ECR-PECVD, TEOS-PECVD and Vapox-APCVD
    • DOI 10.1016/j.jnoncrysol.2005.10.030, PII S0022309306001086
    • A. Pecora, L. Maiolo, G. Fortunato, C. Caligiore, A comparative analysis of silicon dioxide films deposited by ECR-PECVD, TEOS-PECVD and Vapox-APCVD, Journal of Non-Crystalline Solids 352 (2006) 1430-1433. (Pubitemid 43816457)
    • (2006) Journal of Non-Crystalline Solids , vol.352 , Issue.9-20 SPEC. ISS. , pp. 1430-1433
    • Pecora, A.1    Maiolo, L.2    Fortunato, G.3    Caligiore, C.4
  • 53
    • 68049124694 scopus 로고    scopus 로고
    • Flexible alcohol vapor sensors using multiple spraycoated SWNTs on PES substrates
    • S.J. Kim, Flexible alcohol vapor sensors using multiple spraycoated SWNTs on PES substrates, Journal of the Korean Physical Society 54 (5 (Pt. 1)) (2009) 1779-1783.
    • (2009) Journal of the Korean Physical Society , vol.54 , Issue.5 PART 1 , pp. 1779-1783
    • Kim, S.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.