Investigation of atomic oxygen density in a capacitively coupled O 2/SF6 discharge using two-photon absorption laser-induced fluorescence spectroscopy and a Langmuir probe

Plasma Sources Science and Technology

Volumn 22, Issue 4, 2013, Pages

  Kechkar, S ^a   Swift, P ^a   Conway, J ^a   Turner, M ^a   Daniels, S ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC OXYGEN DENSITY; CAPACITIVELY COUPLED; CAPACITIVELY COUPLED PLASMAS; CYLINDRICAL LANGMUIR PROBE; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; LASER INDUCED FLUORESCENCE; LASER INDUCED FLUORESCENCE SPECTROSCOPY; TWO-PHOTON ABSORPTIONS;

ATOMS; ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; FLUORESCENCE MICROSCOPY; FLUORESCENCE SPECTROSCOPY; LANGMUIR PROBES; LASER PRODUCED PLASMAS; SULFUR HEXAFLUORIDE; TWO PHOTON PROCESSES;

OXYGEN;

EID: 84880606842     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/22/4/045013     Document Type: Article

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