Comparison of plasma parameters determined with a Langmuir probe and with a retarding field energy analyzer

Plasma Sources Science and Technology

Volumn 17, Issue 3, 2008, Pages

  Gahan, D ^a   Dolinaj, B ^a   Hopkins, M B ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DISTRIBUTION FUNCTIONS; HIGH ENERGY PHYSICS; INERT GASES; LANGMUIR PROBES; MAGNETRONS; PLASMA DEVICES; PLASMAS;

ARGON GAS PRESSURE; BULK PLASMA; ELECTRON ENERGY DISTRIBUTION FUNCTION; ENERGY ANALYZERS; INDUCTIVE DISCHARGES; ION FLUXES; LANGMUIR; PLASMA PARAMETERS; PLASMA POTENTIALS; PROBE MEASUREMENTS; RETARDING FIELD; TIME AVERAGING;

ELECTRIC DISCHARGES;

EID: 51849103194     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/3/035026     Document Type: Article

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