RF MEMS switches with RuO2-Au contacts cycled to 10 billion cycles

Journal of Microelectromechanical Systems

Volumn 22, Issue 3, 2013, Pages 655-661

  Czaplewski, David A ^a,b   Nordquist, Christopher D ^a   Patrizi, Gary A ^a   Kraus, Garth M ^a   Cowan, William D ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Contact evolution; electrical contacts; friction polymer; gold; microelectromechanical systems (MEMS); relay; RF MEMS; ruthenium; ruthenium oxide; switch; wear

Indexed keywords

ELECTRICAL CONTACTS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); RELAY; RF-MEMS; RUTHENIUM OXIDE;

DESIGN; ELECTROMECHANICAL DEVICES; GOLD; MEMS; METALLURGY; RUTHENIUM; RUTHENIUM ALLOYS; SWITCHES; WEAR OF MATERIALS;

RUTHENIUM COMPOUNDS;

EID: 84878556953     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2239256     Document Type: Article

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