Improving performance of the metal-to-metal contact RF MEMS switch with a Pt-Au microspring contact design

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Liu, Bo ^a   Lv, Zhiqiu ^a   He, Xunjun ^a   Liu, Meng ^a   Hao, Yilong ^a   Li, Zhihong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; CONTACT DESIGN; CONTACT SWITCHES; FABRICATION TOLERANCES; IMPROVING PERFORMANCE; IN-LINE; MECHANICAL WEAR; METAL-TO-METAL CONTACT; MICROSPRING; MICROSPRING DESIGN; POWER HANDLING; RADIO FREQUENCY-MEMS; RF PERFORMANCE; RF-MEMS SWITCHES; SOLID CONTACTS;

ELECTRIC SWITCHES; METALS;

PLATINUM;

EID: 79957958668     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065038     Document Type: Article

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