Lifetime measurements on a high-reliability RF-MEMS contact switch

IEEE Microwave and Wireless Components Letters

Volumn 18, Issue 2, 2008, Pages 100-102

  Newman, Harvey S ^a,b   Ebel, John L ^a,c   Judy, Daniel ^d   Maciel, John ^a,e  

^a IEEE

^b NAVAL RESEARCH LABORATORY   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

^d U S ARMY RESEARCH LABORATORY   (United States)

^e Radant MEMS Inc   (United States)

Author keywords

Microelectromechanical systems (MEMS) devices; Reliability testing; Switches

Indexed keywords

MATHEMATICAL MODELS; RELIABILITY ANALYSIS; SWITCHES;

CANTILEVER CONTACT SWITCHES; LIFETIME MEASUREMENTS; SWITCH CYCLES; SWITCHED MODE;

MEMS;

EID: 38949189275     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2007.915037     Document Type: Article

References (5)

1. G. M. Rebeiz, RF MEMS: Theory, Design, and Technology. New York: Wiley, 2003, pp. 121-153.
2. A. Tazzoli, V. Peretti, R. Gaddi, A. Gnudi, E. Zanoni, and G. Meneghesso, "Reliability issues in RF-MEMS switches submitted to cycling and ESD test," in Proc. IEEE Int. Rel. Phys. Symp., Mar. 2006, pp. 410-415.
3. S. Majumder, J. Lampen, R. Morrison, and J. Maciel, "A packaged, high-lifetime ohmic MEMS RF switch," in IEEE MTT-S Int. Dig., Philadelphia, PA, Jun. 2003, pp. 1935-1938.
4. J. Lampen, S. Majumder, R. Morrison, A. Chaudhry, and J. Maciel, "A wafer-capped, high-lifetime ohmic MEMS RF switch," Int. J. RF Micow. Comput.-Aided Eng., vol. 14, no. 4, pp. 338-344, Jul. 2004.
5. J. J. Maciel, J. F. Slocum, J. K. Smith, and J. Turtle, "MEMS electronically steerable antennas for fire control radars," in IEEE Radar Conf. Dig., Boston, MA, Apr. 2007, pp. 677-682.