메뉴 건너뛰기




Volumn , Issue , 2004, Pages 214-221

Micro-switches with sputtered Au, AuPd, Au-on-AuPt, and AuPtCu alloy electric contacts

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT RESISTANCE; ELECTRON TRANSPORT; MICRO-SWITCHES; TERTIARY ALLOY;

EID: 16244422051     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (18)

References (28)
  • 3
    • 0035948942 scopus 로고    scopus 로고
    • Study of contacts in an electrostactically actuated microswitch
    • S. Majumder, et al., "Study of contacts in an electrostactically actuated microswitch," Sens, and Act. A., 93:1, pp 19-26, 2001.
    • (2001) Sens, and Act. A. , vol.93 , Issue.1 , pp. 19-26
    • Majumder, S.1
  • 4
    • 0001557067 scopus 로고
    • The size effect and the non-local Boltzmann transport equation in orifice and disk geometry
    • G. Wexler, "The size effect and the non-local Boltzmann transport equation in orifice and disk geometry," Proc. Phys. Soc., 89, pp 927-941, 1966.
    • (1966) Proc. Phys. Soc. , vol.89 , pp. 927-941
    • Wexler, G.1
  • 6
    • 0023332043 scopus 로고
    • An elastic-plastic model for the contact of rough surfaces
    • W. Chang, I. Etison, and D. Bogy, "An elastic-plastic model for the contact of rough surfaces" ASME J. of Tribol., 109, pp 257-263, 1987.
    • (1987) ASME J. of Tribol. , vol.109 , pp. 257-263
    • Chang, W.1    Etison, I.2    Bogy, D.3
  • 7
    • 0141522752 scopus 로고    scopus 로고
    • Electrical contact resistance theory for conductive rough surfaces
    • L. Kogut and K. Komvopolous, "Electrical contact resistance theory for conductive rough surfaces" Amer. Inst. of Phys., 94:5, pp 3153-3162, 2003.
    • (2003) Amer. Inst. of Phys. , vol.94 , Issue.5 , pp. 3153-3162
    • Kogut, L.1    Komvopolous, K.2
  • 8
    • 0742320701 scopus 로고    scopus 로고
    • Electrical contact resistance theory for conductive rough surfaces separated by a thin insulating film
    • L. Kogut and K. Komvopolous, "Electrical contact resistance theory for conductive rough surfaces separated by a thin insulating film." Amer. Inst. of Phys., 95:2 pp 576-585, 2003.
    • (2003) Amer. Inst. of Phys. , vol.95 , Issue.2 , pp. 576-585
    • Kogut, L.1    Komvopolous, K.2
  • 9
    • 0031366648 scopus 로고    scopus 로고
    • An elastic-plastic model for a rough surface with an ion-plated soft metallic coating
    • W. Chang, "An elastic-plastic model for a rough surface with an ion-plated soft metallic coating," J. of Wear, 212, pp 229-237, 1997.
    • (1997) J. of Wear , vol.212 , pp. 229-237
    • Chang, W.1
  • 10
    • 0033300168 scopus 로고    scopus 로고
    • Size-dependent electrical constriction resistance for contacts of arbitrary size: From Sharvin to Holm limits
    • A. Mikrajuddin, F. Shi, H. Kim, and K. Okuyama, "Size-dependent electrical constriction resistance for contacts of arbitrary size: from Sharvin to Holm limits," Mat. Sci. in Semi. Proc., 2 pp 321-327, 1999.
    • (1999) Mat. Sci. in Semi. Proc. , vol.2 , pp. 321-327
    • Mikrajuddin, A.1    Shi, F.2    Kim, H.3    Okuyama, K.4
  • 11
    • 0037252952 scopus 로고    scopus 로고
    • Electromechanical considerations in developing low-voltage RF MEMS switches
    • D. Peroulis, S. Pacheco, K. Sarabandi, and L. Katehi, "Electromechanical considerations in developing low-voltage RF MEMS switches." IEEE Trans. on MTT, 51:1, pp 259-70, 2003.
    • (2003) IEEE Trans. on MTT , vol.51 , Issue.1 , pp. 259-270
    • Peroulis, D.1    Pacheco, S.2    Sarabandi, K.3    Katehi, L.4
  • 13
    • 0035284280 scopus 로고    scopus 로고
    • MEMS microswitches for reconfigurable microwave circuitry
    • S. Duffy, et al., "MEMS microswitches for reconfigurable microwave circuitry," IEEE Micro. and Wire. Comp. Lett., 11:3, pp 106-108, 2001.
    • (2001) IEEE Micro. and Wire. Comp. Lett. , vol.11 , Issue.3 , pp. 106-108
    • Duffy, S.1
  • 14
    • 0033537519 scopus 로고    scopus 로고
    • Contact measurements providing basic design data for microrelay actuators
    • J. Schimkat, "Contact measurements providing basic design data for microrelay actuators," Sens. and Act. A., 73, pp 138-143, 1999.
    • (1999) Sens. and Act. A. , vol.73 , pp. 138-143
    • Schimkat, J.1
  • 15
    • 0031098105 scopus 로고    scopus 로고
    • Micromechanical switches fabricated using nickel surface micromachining
    • P. Zavracky, S. Majumder, and N. McGrucr, "Micromechanical switches fabricated using nickel surface micromachining," J. of MEMS, 6:1, pp 3-9, 1999.
    • (1999) J. of MEMS , vol.6 , Issue.1 , pp. 3-9
    • Zavracky, P.1    Majumder, S.2    McGrucr, N.3
  • 16
    • 0000642085 scopus 로고
    • Specifying surface quantity - A method based on the accurate measurement and comparison
    • E. Abbot and F. Firestone, "Specifying surface quantity - a method based on the accurate measurement and comparison," ASME Mech. Eng., 55, pp 569, 1933.
    • (1933) ASME Mech. Eng. , vol.55 , pp. 569
    • Abbot, E.1    Firestone, F.2
  • 18
    • 0036740668 scopus 로고    scopus 로고
    • Elastic-plastic contact analysis of a sphere and a rigid flat
    • L. Kogut and I. Etsion, "Elastic-Plastic Contact Analysis of a Sphere and a Rigid Flat" J. of Applied Mech., 69, pp 657-662, 2002.
    • (2002) J. of Applied Mech. , vol.69 , pp. 657-662
    • Kogut, L.1    Etsion, I.2
  • 19
    • 0000827365 scopus 로고
    • Contact of nominally flat surfaces
    • J. Greenwood and J. Williamson, "Contact of nominally flat surfaces," Proc. Royal Soc. A. 295, p 257-263, 1966.
    • (1966) Proc. Royal Soc. A. , vol.295 , pp. 257-263
    • Greenwood, J.1    Williamson, J.2
  • 20
    • 0022528585 scopus 로고
    • Predicting microfracture in ceramics via a microcontact model
    • J. McCool, "Predicting microfracture in ceramics via a microcontact model," ASME J. of Tribol. 108, pp 380-386, 1986.
    • (1986) ASME J. of Tribol. , vol.108 , pp. 380-386
    • McCool, J.1
  • 21
    • 0015248524 scopus 로고
    • The contact of two nominally flat rough surfaces
    • J. Greenwood and J. Tripp, "The contact of two nominally flat rough surfaces," Proc. Inst. of Mech. Eng., 185, pp 625-633, 1971.
    • (1971) Proc. Inst. of Mech. Eng. , vol.185 , pp. 625-633
    • Greenwood, J.1    Tripp, J.2
  • 22
    • 0037375314 scopus 로고    scopus 로고
    • Quantum properties of atomic-sized conductors
    • N. Agraït. "Quantum properties of atomic-sized conductors," Physics Reports, 377 pp 81-279, 2003.
    • (2003) Physics Reports , vol.377 , pp. 81-279
    • Agraït, N.1
  • 26
    • 84860105350 scopus 로고    scopus 로고
    • MicroChem Corp., http://www.microchem.com, 2003.
  • 27
    • 0033319678 scopus 로고
    • Contact physics of gold microcontacts for MEMS microswitches
    • D. Hyman and M. Mehregany, "Contact physics of gold microcontacts for MEMS microswitches" IEEE Trans. on Comp. and Pack. Tech. 22:3 pp 357-64, 1992.
    • (1992) IEEE Trans. on Comp. and Pack. Tech. , vol.22 , Issue.3 , pp. 357-364
    • Hyman, D.1    Mehregany, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.