An improved SPM-based contact tester for the study of microcontacts

Journal of Micromechanics and Microengineering

Volumn 22, Issue 4, 2012, Pages

  Chen, L ^a   Guo, Z J ^a   Joshi, N ^a   Eid, H ^a   Adams, G G ^a   McGruer, N E ^a  

^a Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELECTRIC CONTACTS; METAL TESTING; METALS; SENSORS; SILICON;

CONTACT FORCES; CONTACT MATERIAL; DISSIMILAR CONTACT; LAYERED STRUCTURES; PLASMA CLEANING; SIMULTANEOUS MEASUREMENT; SWITCH OPERATION; UV-OZONE TREATMENT;

GOLD;

EID: 84866322536     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/4/045017     Document Type: Article

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