Characterization of contact resistance stability in MEM relays with tungsten electrodes

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 511-513

  Chen, Yenhao ^a   Nathanael, Rhesa ^a   Jeon, Jaeseok ^b   Yaung, Jack ^a   Hutin, Louis ^a   Liu, Tsu Jae King ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

Contact resistance; MEM switch; microelectromechanical (MEM) relay; stability

Indexed keywords

CONTACT RESISTANCE STABILITY; MICRO-ELECTRO-MECHANICAL; OFF TIME; ON-STATE RESISTANCE; OPERATING CYCLE; OPERATING PARAMETERS; SWITCHING CYCLES; TUNGSTEN ELECTRODES;

CONTACT RESISTANCE; CONVERGENCE OF NUMERICAL METHODS; TUNGSTEN;

ELECTRODES;

EID: 84862806145     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2186282     Document Type: Article

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