A soft-landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1586-1594

  Czaplewski, David A ^a   Dyck, Christopher W ^a   Sumali, Hartono ^a   Massad, Jordan E ^a   Kuppers, Jaron D ^a   Reines, Isak ^a   Cowan, William D ^a   Tigges, Christopher P ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; LASER APPLICATIONS; SWITCHING SYSTEMS; WAVEFORM ANALYSIS;

LASER DOPPLER VIBROMETRY; MICROELECTROMECHANICAL SYSTEMS SWITCH; SOFT-LANDING ACTUATION WAVEFORM;

MICROELECTROMECHANICAL DEVICES;

EID: 33845538318     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883576     Document Type: Article

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