Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of friction polymer on the contacts

Journal of Micromechanics and Microengineering

Volumn 22, Issue 10, 2012, Pages

  Czaplewski, David A ^a   Nordquist, Christopher D ^b   Dyck, Christopher W ^b   Patrizi, Gary A ^b   Kraus, Garth M ^b   Cowan, William D ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FAILURES; ALL METAL; CARBON ACCUMULATION; CATALYTIC BEHAVIOR; CATALYTIC MATERIALS; CONTACT FORCES; CONTACT MATERIAL; CONTROLLED ENVIRONMENT; DIFFERENT MECHANISMS; FAILURE MECHANISM; HERMETICALLY SEALED GLASS; RF-MEMS; RF-MEMS SWITCHES; SWITCH DESIGNS;

ADHESION; DISSIMILAR METALS; ELECTRIC CONTACTS; ELECTRONICS PACKAGING; IRIDIUM; PLATINUM;

CONTACTS (FLUID MECHANICS);

EID: 84866340493     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/10/105005     Document Type: Article

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