Metal contact reliability of RF MEMS switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6463, Issue , 2007, Pages

  Ma, Qing ^a   Tran, Quan ^a   Chou, Tsung Kuan A ^a   Heck, John ^a   Bar, Hanan ^a   Kant, Rishi ^a   Rao, Valluri ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Contact; MEMS switch; Reliability

Indexed keywords

MEMS SWITCH; METAL CONTACTS;

CONTACT RESISTANCE; FREQUENCY BANDS; INSERTION LOSSES; MEMS; SWITCHING SYSTEMS; WIRELESS TELECOMMUNICATION SYSTEMS;

RELIABILITY;

EID: 34247379448     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.702177     Document Type: Conference Paper

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