Minimum energy actuation and bounce-back behavior of microbeams using δ voltage pulses

Journal of Microelectromechanical Systems

Volumn 17, Issue 3, 2008, Pages 668-677

  Wang, Yuyan ^a   Talghader, Joseph J ^a  

^a University of Minnesota   (United States)

Author keywords

Beams; Electrostatic actuators; Microactuators; Microelectromechanical devices

Indexed keywords

ELECTROSTATIC ACCELERATORS; ELECTROSTATIC ACTUATORS; LEAD; MATHEMATICAL MODELS; METAL RECOVERY; SURFACES;

ACTUATION VOLTAGES; APPLIED (CO); CLAMPED BEAMS; CONTACTING SURFACES; ELASTIC RESPONSE]; ELECTROSTATIC ACTUATIONS; EXPERIMENT RESULTS; HIGH-VOLTAGE (HV); IMPACT FORCES; IN PHASE (IP); MICRO-BEAMS; MINIMUM ENERGY; PULL-IN; PULSE CONTROLS; SEMI CONDUCTOR SURFACES; SIMPLIFIED MATHEMATICAL MODEL; SOFT CONTACTS; VOLTAGE PULSES;

ELECTRIC POTENTIAL;

EID: 45449111558     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.921682     Document Type: Article

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