Miniature MEMS switches for RF applications

Journal of Microelectromechanical Systems

Volumn 20, Issue 6, 2011, Pages 1324-1335

  Stefanini, Romain ^a   Chatras, Matthieu ^a   Blondy, Pierre ^a   Rebeiz, Gabriel M ^b  

^a UNIVERSITY OF LIMOGES   (France)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Array; contact resistance; microelectromechanical systems; stress control; switches

Indexed keywords

ACTUATION VOLTAGES; ARRAY; CURRENT DIVISION; MEMS (MICROELECTROMECHANICAL SYSTEM); MEMS SWITCHES; METAL CONTACTS; MICRO ELECTRO MECHANICAL SYSTEM; RELEASE TIME; RF APPLICATIONS; RF-MEMS SWITCHES; STRESS CONTROL; STRESS EFFECTS; STRESS GRADIENT; SWITCH ARRAYS; SWITCH RESISTANCE; SWITCHING DEVICES; SWITCHING TIME;

CONTACT RESISTANCE; ELECTRIC SWITCHES; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; SWITCHES;

MEMS;

EID: 82455189633     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2170822     Document Type: Article

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