Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation

Sensors and Actuators, A: Physical

Volumn 197, Issue , 2013, Pages 76-87

  Gu, Guo Ying ^a   Zhu, Li Min ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Creep; Hysteresis; Motion control; Nanopositioning; Piezoceramic actuator; Vibration

Indexed keywords

HIGH-PERFORMANCE MOTION CONTROL; INTEGRATED CONTROL STRATEGY; INTEGRATED CONTROLLERS; MODELING UNCERTAINTIES; NANO-POSITIONING; PIEZO-CERAMIC ACTUATORS; VIBRATION; VIBRATION COMPENSATION;

CREEP; INTEGRATED CONTROL; MOTION CONTROL; PIEZOELECTRIC ACTUATORS; UNCERTAINTY ANALYSIS;

HYSTERESIS;

EID: 84877352405     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.03.005     Document Type: Article

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