Novel control scheme for a high-speed metrological scanning probe microscope

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Vorbringer Dorozhovets, N ^a   Hausotte, T ^a   Manske, E ^a   Shen, J C ^b   Jager G ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

high speed measurement; metrological SPM; nanopositioning and nanomeasuring machine

Indexed keywords

CALIBRATION; INTERFEROMETERS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SCANNING; SPEED;

COMBINED DEFLECTION; HIGH SPEED MEASUREMENTS; METROLOGICAL SPM; NANOPOSITIONING AND NANOMEASURING MACHINES; NOVEL CONTROL SCHEME; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; PROCESS MEASUREMENTS; SENSOR TECHNOLOGIES;

PRECISION ENGINEERING;

EID: 80051674113     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094012     Document Type: Article

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