Complete open loop control of hysteretic, creeped, and oscillating piezoelectric cantilevers

IEEE Transactions on Automation Science and Engineering

Volumn 7, Issue 3, 2010, Pages 440-450

  Rakotondrabe, Micky ^a   Clévy, Cédric ^a   Lutz, Philippe ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Creep compensation; hysteresis compensation; input shaping; microassembly micromanipulation; piezoelectric cantilever; vibration compensation

Indexed keywords

FEED-FORWARD COMPENSATION; FEEDFORWARD TECHNIQUE; HYSTERESIS COMPENSATION; INPUT SHAPING; INVERSE MODELS; MICRO ASSEMBLY; MODEL INVERSION; NON-LINEARITY; OPEN LOOP CONTROL; PIEZOELECTRIC CANTILEVERS;

ATOMIC FORCE MICROSCOPY; CREEP; NANOCANTILEVERS; PIEZOELECTRICITY;

HYSTERESIS;

EID: 77954382510     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2009.2028617     Document Type: Article

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