Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties

Applied Optics

Volumn 47, Issue 11, 2008, Pages 1846-1850

  Zorba, V ^a,b,e   Boukos, N ^c   Zergioti, I ^d   Fotakis, C ^a,b  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^b UNIVERSITY OF CRETE   (Greece)

^c INSTITUTE OF MATERIALS SCIENCE   (Greece)

^d NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^e NONE

Author keywords

[No Author keywords available]

Indexed keywords

LASER PULSES; NANOCRYSTALLINE SILICON; NANOCRYSTALS; OPTICAL PROPERTIES; SILICON;

CRYSTALLINITIES; LASER PULSE DURATION; NANOCRYSTALLINE SI; NANOSECOND LASERS; SI-BASED PHOTODETECTORS; SINGLE-CRYSTALLINE; SPECTRAL RESPONSE; STRUCTURAL AND OPTICAL PROPERTIES;

AMORPHOUS SILICON;

EID: 49749103668     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.001846     Document Type: Article

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