Direct creation of black silicon using femtosecond laser pulses

Applied Surface Science

Volumn 257, Issue 16, 2011, Pages 7291-7294

  Vorobyev, A Y ^a   Guo, Chunlei ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Femtosecond laser; Microstructures; Nanostructures; Reflectance; Silicon

Indexed keywords

LASER PULSES; MICROSTRUCTURE; MILLIMETER WAVES; NANOSTRUCTURES; REFLECTION; SILICON;

ANTI-REFLECTION EFFECTS; BLACK SILICON; MID-INFRARED WAVELENGTH RANGES; MILLIMETER WAVELENGTH; SILICON REFLECTANCE; TERAHERTZ FREQUENCIES; VIEWING ANGLE; VISIBLE REGION;

FEMTOSECOND LASERS;

EID: 79955611768     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.03.106     Document Type: Article

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